Matches in SemOpenAlex for { <https://semopenalex.org/work/W1978079409> ?p ?o ?g. }
Showing items 1 to 67 of
67
with 100 items per page.
- W1978079409 endingPage "512" @default.
- W1978079409 startingPage "509" @default.
- W1978079409 abstract "The aim of this work is to investigate the possibility to produce an etch-stop layer in silicon through nitrogen ion implantation. The etching process is influenced by nitrogen concentrations in silicon above 1·1020 cm−3. Under the experimental conditions the observed step height between the implanted region and the unimplanted one did not exceed 1.8 μm." @default.
- W1978079409 created "2016-06-24" @default.
- W1978079409 creator A5012487905 @default.
- W1978079409 creator A5020494627 @default.
- W1978079409 creator A5056868376 @default.
- W1978079409 creator A5062203939 @default.
- W1978079409 date "1995-02-01" @default.
- W1978079409 modified "2023-09-25" @default.
- W1978079409 title "Nitrogen implanted etch-stop layers in silicon" @default.
- W1978079409 cites W1843247108 @default.
- W1978079409 doi "https://doi.org/10.1016/0167-9317(94)00155-n" @default.
- W1978079409 hasPublicationYear "1995" @default.
- W1978079409 type Work @default.
- W1978079409 sameAs 1978079409 @default.
- W1978079409 citedByCount "0" @default.
- W1978079409 crossrefType "journal-article" @default.
- W1978079409 hasAuthorship W1978079409A5012487905 @default.
- W1978079409 hasAuthorship W1978079409A5020494627 @default.
- W1978079409 hasAuthorship W1978079409A5056868376 @default.
- W1978079409 hasAuthorship W1978079409A5062203939 @default.
- W1978079409 hasConcept C100460472 @default.
- W1978079409 hasConcept C121285527 @default.
- W1978079409 hasConcept C130472188 @default.
- W1978079409 hasConcept C145148216 @default.
- W1978079409 hasConcept C171250308 @default.
- W1978079409 hasConcept C178790620 @default.
- W1978079409 hasConcept C185592680 @default.
- W1978079409 hasConcept C192562407 @default.
- W1978079409 hasConcept C2779227376 @default.
- W1978079409 hasConcept C41823505 @default.
- W1978079409 hasConcept C49040817 @default.
- W1978079409 hasConcept C537208039 @default.
- W1978079409 hasConcept C544956773 @default.
- W1978079409 hasConceptScore W1978079409C100460472 @default.
- W1978079409 hasConceptScore W1978079409C121285527 @default.
- W1978079409 hasConceptScore W1978079409C130472188 @default.
- W1978079409 hasConceptScore W1978079409C145148216 @default.
- W1978079409 hasConceptScore W1978079409C171250308 @default.
- W1978079409 hasConceptScore W1978079409C178790620 @default.
- W1978079409 hasConceptScore W1978079409C185592680 @default.
- W1978079409 hasConceptScore W1978079409C192562407 @default.
- W1978079409 hasConceptScore W1978079409C2779227376 @default.
- W1978079409 hasConceptScore W1978079409C41823505 @default.
- W1978079409 hasConceptScore W1978079409C49040817 @default.
- W1978079409 hasConceptScore W1978079409C537208039 @default.
- W1978079409 hasConceptScore W1978079409C544956773 @default.
- W1978079409 hasIssue "1-4" @default.
- W1978079409 hasLocation W19780794091 @default.
- W1978079409 hasOpenAccess W1978079409 @default.
- W1978079409 hasPrimaryLocation W19780794091 @default.
- W1978079409 hasRelatedWork W1718351444 @default.
- W1978079409 hasRelatedWork W1964537084 @default.
- W1978079409 hasRelatedWork W1978079409 @default.
- W1978079409 hasRelatedWork W2008419825 @default.
- W1978079409 hasRelatedWork W2046836154 @default.
- W1978079409 hasRelatedWork W2050537665 @default.
- W1978079409 hasRelatedWork W2051282158 @default.
- W1978079409 hasRelatedWork W2089600663 @default.
- W1978079409 hasRelatedWork W2091119901 @default.
- W1978079409 hasRelatedWork W2096798711 @default.
- W1978079409 hasVolume "27" @default.
- W1978079409 isParatext "false" @default.
- W1978079409 isRetracted "false" @default.
- W1978079409 magId "1978079409" @default.
- W1978079409 workType "article" @default.