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• W1978086154 abstract "It is reported for the first time that the periodical ripple surface feature at micrometer-scale was observed on hydrogenated amorphous carbon nitride films deposited by pulse plasma chemical vapor deposition (CVD) technique. Nitrogen incorporation to hydrogenated amorphous carbon films and the different growing environments of pulse dc plasma discharge perhaps played crucial role in the surface morphology transformation of hydrogenated amorphous carbon nitride films." @default.
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• W1978086154 date "2007-02-01" @default.
• W1978086154 modified "2023-09-25" @default.
• W1978086154 title "Ripple surface generated on hydrogenated amorphous carbon nitride films" @default.
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• W1978086154 doi "https://doi.org/10.1016/j.apsusc.2006.09.009" @default.
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