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- W1978108237 abstract "A sensitive interferometric method is employed to quantify the deformation of silicon substrates coated with thin plasma-polymerized acrylonitrile film deposited at room temperature. This provides insight into the structural variation of plasma polymerized films." @default.
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- W1978108237 date "2010-01-01" @default.
- W1978108237 modified "2023-09-26" @default.
- W1978108237 title "Measurement of the Deformation of Silicon Substrates Coated with a Plasma-Polymerized Acrylonitrile Film" @default.
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- W1978108237 doi "https://doi.org/10.1364/oic.2010.wb7" @default.
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