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• W1978111511 abstract "Abstract Although titanium disilicide is composed mostly of a nonmetallic element, its electrical conductivity is metal-like. The question therefore arises as to whether the reactivity of TiSi 2 toward gases resembles metals, nonmetals, or some admixture. To investigate this question, the adsorption/desorption kinetics of SiH 4 on polycrystalline TiSi 2 were measured by temperature programmed desorption. SiH 4 interacts strongly with the surface, and only H 2 is observed as a desorption product near 300 K. The kinetics shift from second to first order as the coverage increases above 0.07. There is a crudely Gaussian distribution of desorption energies centered near 19 ± 2 kcal/mol, with a full width at half maximum near 9 kcal/mol. In these and other respects, the behavior of TiSi 2 toward SiH 4 and H 2 mirrors that of typical metals. Coadsorption studies with TiCl 4 further support this conclusion and also give insights into the chemical vapor deposition of TiSi 2 from these two source gases." @default.
• W1978111511 created "2016-06-24" @default.
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• W1978111511 date "1995-05-01" @default.
• W1978111511 modified "2023-09-27" @default.
• W1978111511 title "SiH4 on TiSi2: an investigation of gas adsorption on metal-like compounds" @default.
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• W1978111511 doi "https://doi.org/10.1016/0039-6028(95)00012-7" @default.
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