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- W1978299210 endingPage "193" @default.
- W1978299210 startingPage "191" @default.
- W1978299210 abstract "Electron Beam Proximity Printing has been reported on several years ago. Meanwhile an experimental tool was built in IBM Sindelfingen. This paper presents some technical details, the resulting tool capabilities and some results achieved so far." @default.
- W1978299210 created "2016-06-24" @default.
- W1978299210 creator A5000874639 @default.
- W1978299210 creator A5015845135 @default.
- W1978299210 creator A5035399275 @default.
- W1978299210 creator A5050268095 @default.
- W1978299210 creator A5052779493 @default.
- W1978299210 creator A5056491370 @default.
- W1978299210 creator A5074513306 @default.
- W1978299210 date "1989-05-01" @default.
- W1978299210 modified "2023-09-25" @default.
- W1978299210 title "Electron beam proximity printing" @default.
- W1978299210 doi "https://doi.org/10.1016/0167-9317(89)90045-2" @default.
- W1978299210 hasPublicationYear "1989" @default.
- W1978299210 type Work @default.
- W1978299210 sameAs 1978299210 @default.
- W1978299210 citedByCount "2" @default.
- W1978299210 crossrefType "journal-article" @default.
- W1978299210 hasAuthorship W1978299210A5000874639 @default.
- W1978299210 hasAuthorship W1978299210A5015845135 @default.
- W1978299210 hasAuthorship W1978299210A5035399275 @default.
- W1978299210 hasAuthorship W1978299210A5050268095 @default.
- W1978299210 hasAuthorship W1978299210A5052779493 @default.
- W1978299210 hasAuthorship W1978299210A5056491370 @default.
- W1978299210 hasAuthorship W1978299210A5074513306 @default.
- W1978299210 hasConcept C120665830 @default.
- W1978299210 hasConcept C121332964 @default.
- W1978299210 hasConcept C127413603 @default.
- W1978299210 hasConcept C147120987 @default.
- W1978299210 hasConcept C168834538 @default.
- W1978299210 hasConcept C171250308 @default.
- W1978299210 hasConcept C185544564 @default.
- W1978299210 hasConcept C192562407 @default.
- W1978299210 hasConcept C41008148 @default.
- W1978299210 hasConcept C49040817 @default.
- W1978299210 hasConcept C61696701 @default.
- W1978299210 hasConcept C70388272 @default.
- W1978299210 hasConcept C95312477 @default.
- W1978299210 hasConceptScore W1978299210C120665830 @default.
- W1978299210 hasConceptScore W1978299210C121332964 @default.
- W1978299210 hasConceptScore W1978299210C127413603 @default.
- W1978299210 hasConceptScore W1978299210C147120987 @default.
- W1978299210 hasConceptScore W1978299210C168834538 @default.
- W1978299210 hasConceptScore W1978299210C171250308 @default.
- W1978299210 hasConceptScore W1978299210C185544564 @default.
- W1978299210 hasConceptScore W1978299210C192562407 @default.
- W1978299210 hasConceptScore W1978299210C41008148 @default.
- W1978299210 hasConceptScore W1978299210C49040817 @default.
- W1978299210 hasConceptScore W1978299210C61696701 @default.
- W1978299210 hasConceptScore W1978299210C70388272 @default.
- W1978299210 hasConceptScore W1978299210C95312477 @default.
- W1978299210 hasIssue "1-4" @default.
- W1978299210 hasLocation W19782992101 @default.
- W1978299210 hasOpenAccess W1978299210 @default.
- W1978299210 hasPrimaryLocation W19782992101 @default.
- W1978299210 hasRelatedWork W1503771590 @default.
- W1978299210 hasRelatedWork W169855013 @default.
- W1978299210 hasRelatedWork W1981977086 @default.
- W1978299210 hasRelatedWork W2032776713 @default.
- W1978299210 hasRelatedWork W2043874292 @default.
- W1978299210 hasRelatedWork W2264758492 @default.
- W1978299210 hasRelatedWork W3010147217 @default.
- W1978299210 hasRelatedWork W386618884 @default.
- W1978299210 hasRelatedWork W2097172308 @default.
- W1978299210 hasRelatedWork W2299736358 @default.
- W1978299210 hasRelatedWork W2398813417 @default.
- W1978299210 hasRelatedWork W2800540274 @default.
- W1978299210 hasRelatedWork W2814491842 @default.
- W1978299210 hasRelatedWork W2849900824 @default.
- W1978299210 hasRelatedWork W2858672997 @default.
- W1978299210 hasRelatedWork W2864467959 @default.
- W1978299210 hasRelatedWork W2872652876 @default.
- W1978299210 hasRelatedWork W2878445087 @default.
- W1978299210 hasRelatedWork W2930888233 @default.
- W1978299210 hasVolume "9" @default.
- W1978299210 isParatext "false" @default.
- W1978299210 isRetracted "false" @default.
- W1978299210 magId "1978299210" @default.
- W1978299210 workType "article" @default.