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- W1978327009 abstract "In this paper, we demonstrated the plasticity mechanism for copper (Cu) extrusion in through-silicon via structures under thermal cycling. The local plasticity was directly observed by synchrotron x-ray micro-diffraction near the top of the via with the amount increasing with the peak temperature. The Cu extrusion was confirmed by Atomic Force Microscopy (AFM) measurements and found to be consistent with the observed Cu plasticity behavior. A simple analytical model elucidated the role of plasticity during thermal cycling, and finite element analyses were carried out to confirm the plasticity mechanism as well as the effect of the via/Si interface. The model predictions were able to account for the via extrusions observed in two types of experiments, with one representing a nearly free sliding interface and the other a strongly bonded interface. Interestingly, the AFM extrusion profiles seemed to contour with the local grain structures near the top of the via, suggesting that the grain structure not only affects the yield strength of the Cu and thus its plasticity but could also be important in controlling the pop-up behavior and the statistics for a large ensemble of vias." @default.
- W1978327009 created "2016-06-24" @default.
- W1978327009 creator A5016926371 @default.
- W1978327009 creator A5018539904 @default.
- W1978327009 creator A5032841128 @default.
- W1978327009 creator A5037958532 @default.
- W1978327009 creator A5040039077 @default.
- W1978327009 creator A5059860623 @default.
- W1978327009 creator A5061360949 @default.
- W1978327009 creator A5063141275 @default.
- W1978327009 creator A5064827753 @default.
- W1978327009 creator A5089497883 @default.
- W1978327009 date "2013-11-18" @default.
- W1978327009 modified "2023-09-24" @default.
- W1978327009 title "Plasticity mechanism for copper extrusion in through-silicon vias for three-dimensional interconnects" @default.
- W1978327009 cites W2005782305 @default.
- W1978327009 cites W2009722654 @default.
- W1978327009 cites W2010361432 @default.
- W1978327009 cites W2068572823 @default.
- W1978327009 cites W2078145815 @default.
- W1978327009 cites W2078492284 @default.
- W1978327009 cites W2107868198 @default.
- W1978327009 cites W2144149750 @default.
- W1978327009 cites W2160123489 @default.
- W1978327009 cites W2166803207 @default.
- W1978327009 doi "https://doi.org/10.1063/1.4833020" @default.
- W1978327009 hasPublicationYear "2013" @default.
- W1978327009 type Work @default.
- W1978327009 sameAs 1978327009 @default.
- W1978327009 citedByCount "57" @default.
- W1978327009 countsByYear W19783270092014 @default.
- W1978327009 countsByYear W19783270092015 @default.
- W1978327009 countsByYear W19783270092016 @default.
- W1978327009 countsByYear W19783270092017 @default.
- W1978327009 countsByYear W19783270092018 @default.
- W1978327009 countsByYear W19783270092019 @default.
- W1978327009 countsByYear W19783270092020 @default.
- W1978327009 countsByYear W19783270092021 @default.
- W1978327009 countsByYear W19783270092022 @default.
- W1978327009 crossrefType "journal-article" @default.
- W1978327009 hasAuthorship W1978327009A5016926371 @default.
- W1978327009 hasAuthorship W1978327009A5018539904 @default.
- W1978327009 hasAuthorship W1978327009A5032841128 @default.
- W1978327009 hasAuthorship W1978327009A5037958532 @default.
- W1978327009 hasAuthorship W1978327009A5040039077 @default.
- W1978327009 hasAuthorship W1978327009A5059860623 @default.
- W1978327009 hasAuthorship W1978327009A5061360949 @default.
- W1978327009 hasAuthorship W1978327009A5063141275 @default.
- W1978327009 hasAuthorship W1978327009A5064827753 @default.
- W1978327009 hasAuthorship W1978327009A5089497883 @default.
- W1978327009 hasConcept C120665830 @default.
- W1978327009 hasConcept C121332964 @default.
- W1978327009 hasConcept C159985019 @default.
- W1978327009 hasConcept C191897082 @default.
- W1978327009 hasConcept C192562407 @default.
- W1978327009 hasConcept C21368211 @default.
- W1978327009 hasConcept C2778958987 @default.
- W1978327009 hasConcept C47908070 @default.
- W1978327009 hasConcept C544778455 @default.
- W1978327009 hasConcept C544956773 @default.
- W1978327009 hasConcept C79186407 @default.
- W1978327009 hasConcept C87976508 @default.
- W1978327009 hasConceptScore W1978327009C120665830 @default.
- W1978327009 hasConceptScore W1978327009C121332964 @default.
- W1978327009 hasConceptScore W1978327009C159985019 @default.
- W1978327009 hasConceptScore W1978327009C191897082 @default.
- W1978327009 hasConceptScore W1978327009C192562407 @default.
- W1978327009 hasConceptScore W1978327009C21368211 @default.
- W1978327009 hasConceptScore W1978327009C2778958987 @default.
- W1978327009 hasConceptScore W1978327009C47908070 @default.
- W1978327009 hasConceptScore W1978327009C544778455 @default.
- W1978327009 hasConceptScore W1978327009C544956773 @default.
- W1978327009 hasConceptScore W1978327009C79186407 @default.
- W1978327009 hasConceptScore W1978327009C87976508 @default.
- W1978327009 hasIssue "21" @default.
- W1978327009 hasLocation W19783270091 @default.
- W1978327009 hasOpenAccess W1978327009 @default.
- W1978327009 hasPrimaryLocation W19783270091 @default.
- W1978327009 hasRelatedWork W1970597491 @default.
- W1978327009 hasRelatedWork W1979648561 @default.
- W1978327009 hasRelatedWork W2073581597 @default.
- W1978327009 hasRelatedWork W2380293314 @default.
- W1978327009 hasRelatedWork W2739155635 @default.
- W1978327009 hasRelatedWork W2979178134 @default.
- W1978327009 hasRelatedWork W3014812777 @default.
- W1978327009 hasRelatedWork W3082440218 @default.
- W1978327009 hasRelatedWork W4243847514 @default.
- W1978327009 hasRelatedWork W4313357556 @default.
- W1978327009 hasVolume "103" @default.
- W1978327009 isParatext "false" @default.
- W1978327009 isRetracted "false" @default.
- W1978327009 magId "1978327009" @default.
- W1978327009 workType "article" @default.