Matches in SemOpenAlex for { <https://semopenalex.org/work/W1978327768> ?p ?o ?g. }
Showing items 1 to 89 of
89
with 100 items per page.
- W1978327768 endingPage "30" @default.
- W1978327768 startingPage "23" @default.
- W1978327768 abstract "Chemical mechanical planarization (CMP) has become widely accepted for the planarization of device interconnect structures in deep submicron semiconductor manufacturing. Attractive features of CMP include (i) global planarization and (ii) low defect and contamination level. The main challenge of cleaning is to remove the residual particles as well as the metallic contamination. In this paper, a modified post-CMP clean up—multi-chemicals spray cleaning process—is addressed in detail. This new process has been successfully applied to both oxide and tungsten CMP cleaning. The process provides comparable defect performance and excellent removal of metallic contamination to the scrubbing process which has been widely accepted in current post-CMP cleaning usage. The new clean up development strategy also contributes to their low cost of ownership (CoO) and good process flexibility as well as the minimizing cross-contamination." @default.
- W1978327768 created "2016-06-24" @default.
- W1978327768 creator A5000811885 @default.
- W1978327768 creator A5043867538 @default.
- W1978327768 creator A5066461296 @default.
- W1978327768 creator A5074125855 @default.
- W1978327768 date "1998-01-01" @default.
- W1978327768 modified "2023-10-18" @default.
- W1978327768 title "A modified multi-chemicals spray cleaning process for post-CMP cleaning application" @default.
- W1978327768 cites W2021675095 @default.
- W1978327768 cites W2032824931 @default.
- W1978327768 cites W2035974690 @default.
- W1978327768 cites W2075194566 @default.
- W1978327768 doi "https://doi.org/10.1016/s0254-0584(98)80001-1" @default.
- W1978327768 hasPublicationYear "1998" @default.
- W1978327768 type Work @default.
- W1978327768 sameAs 1978327768 @default.
- W1978327768 citedByCount "8" @default.
- W1978327768 countsByYear W19783277682018 @default.
- W1978327768 countsByYear W19783277682021 @default.
- W1978327768 countsByYear W19783277682022 @default.
- W1978327768 crossrefType "journal-article" @default.
- W1978327768 hasAuthorship W1978327768A5000811885 @default.
- W1978327768 hasAuthorship W1978327768A5043867538 @default.
- W1978327768 hasAuthorship W1978327768A5066461296 @default.
- W1978327768 hasAuthorship W1978327768A5074125855 @default.
- W1978327768 hasConcept C111919701 @default.
- W1978327768 hasConcept C112570922 @default.
- W1978327768 hasConcept C123745756 @default.
- W1978327768 hasConcept C127413603 @default.
- W1978327768 hasConcept C160671074 @default.
- W1978327768 hasConcept C165460524 @default.
- W1978327768 hasConcept C171250308 @default.
- W1978327768 hasConcept C178790620 @default.
- W1978327768 hasConcept C180088628 @default.
- W1978327768 hasConcept C185592680 @default.
- W1978327768 hasConcept C18903297 @default.
- W1978327768 hasConcept C192562407 @default.
- W1978327768 hasConcept C21880701 @default.
- W1978327768 hasConcept C2779227376 @default.
- W1978327768 hasConcept C31258907 @default.
- W1978327768 hasConcept C41008148 @default.
- W1978327768 hasConcept C548081761 @default.
- W1978327768 hasConcept C66018809 @default.
- W1978327768 hasConcept C86803240 @default.
- W1978327768 hasConcept C89529581 @default.
- W1978327768 hasConcept C98045186 @default.
- W1978327768 hasConceptScore W1978327768C111919701 @default.
- W1978327768 hasConceptScore W1978327768C112570922 @default.
- W1978327768 hasConceptScore W1978327768C123745756 @default.
- W1978327768 hasConceptScore W1978327768C127413603 @default.
- W1978327768 hasConceptScore W1978327768C160671074 @default.
- W1978327768 hasConceptScore W1978327768C165460524 @default.
- W1978327768 hasConceptScore W1978327768C171250308 @default.
- W1978327768 hasConceptScore W1978327768C178790620 @default.
- W1978327768 hasConceptScore W1978327768C180088628 @default.
- W1978327768 hasConceptScore W1978327768C185592680 @default.
- W1978327768 hasConceptScore W1978327768C18903297 @default.
- W1978327768 hasConceptScore W1978327768C192562407 @default.
- W1978327768 hasConceptScore W1978327768C21880701 @default.
- W1978327768 hasConceptScore W1978327768C2779227376 @default.
- W1978327768 hasConceptScore W1978327768C31258907 @default.
- W1978327768 hasConceptScore W1978327768C41008148 @default.
- W1978327768 hasConceptScore W1978327768C548081761 @default.
- W1978327768 hasConceptScore W1978327768C66018809 @default.
- W1978327768 hasConceptScore W1978327768C86803240 @default.
- W1978327768 hasConceptScore W1978327768C89529581 @default.
- W1978327768 hasConceptScore W1978327768C98045186 @default.
- W1978327768 hasIssue "1" @default.
- W1978327768 hasLocation W19783277681 @default.
- W1978327768 hasOpenAccess W1978327768 @default.
- W1978327768 hasPrimaryLocation W19783277681 @default.
- W1978327768 hasRelatedWork W1592322676 @default.
- W1978327768 hasRelatedWork W1978327768 @default.
- W1978327768 hasRelatedWork W2100435523 @default.
- W1978327768 hasRelatedWork W2137970506 @default.
- W1978327768 hasRelatedWork W2754849977 @default.
- W1978327768 hasRelatedWork W3013287715 @default.
- W1978327768 hasRelatedWork W4224218913 @default.
- W1978327768 hasRelatedWork W4292200432 @default.
- W1978327768 hasRelatedWork W55386148 @default.
- W1978327768 hasRelatedWork W2514976036 @default.
- W1978327768 hasVolume "52" @default.
- W1978327768 isParatext "false" @default.
- W1978327768 isRetracted "false" @default.
- W1978327768 magId "1978327768" @default.
- W1978327768 workType "article" @default.