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- W1978392317 abstract "This paper introduces three methods to deriving gradient estimators of system performance of multi-cluster tools. A multi-cluster tool is composed of multiple single cluster tools connected non-cyclically through intermediate buffer modules. Each single cluster has a separate robot for transporting wafers within the cluster and in and out of the cluster. The coordination among these robots poses a challenge in system-performance analysis and optimal scheduling. This paper focuses on two-cluster tools and develops three approaches (formula-based, linear programming-based, and regression-based) for estimating the gradient of the throughput or any activity times with respect to all timing parameters." @default.
- W1978392317 created "2016-06-24" @default.
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- W1978392317 date "2010-08-01" @default.
- W1978392317 modified "2023-09-23" @default.
- W1978392317 title "On gradient estimation of scheduling for multi-cluster tools with general robot moving times" @default.
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- W1978392317 doi "https://doi.org/10.1109/coase.2010.5584704" @default.
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