FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W1978488002> ?p ?o ?g. }

• W1978488002 endingPage "L6" @default.
• W1978488002 startingPage "L1" @default.
• W1978488002 abstract "In situ Raman scattering spectroscopy is performed in order to probe the chemical dynamics and structure modifications at Ar and SF6 low-pressure plasma-etched silicon surfaces. An Ar plasma induces relatively slight perturbation of the silicon surface, while a SF6 plasma creates highly disordered overlayers induced by the fluorine atoms reacting at ion-induced defects. The overlayer structure is a mixing of an amorphous phase and 10 AA microcrystallites expected to be close to porous silicon structure." @default.
• W1978488002 created "2016-06-24" @default.
• W1978488002 creator A5000235425 @default.
• W1978488002 creator A5020448333 @default.
• W1978488002 creator A5048108410 @default.
• W1978488002 creator A5059038215 @default.
• W1978488002 creator A5080547758 @default.
• W1978488002 date "1994-01-03" @default.
• W1978488002 modified "2023-09-23" @default.
• W1978488002 title "In situ Raman spectroscopy of silicon surfaces during SF₆plasma etching" @default.
• W1978488002 cites W1965881882 @default.
• W1978488002 cites W1974268015 @default.
• W1978488002 cites W1976172180 @default.
• W1978488002 cites W1987425940 @default.
• W1978488002 cites W1996055888 @default.
• W1978488002 cites W1998247492 @default.
• W1978488002 cites W1998253289 @default.
• W1978488002 cites W2016794922 @default.
• W1978488002 cites W2025130530 @default.
• W1978488002 cites W2031930784 @default.
• W1978488002 cites W2038510225 @default.
• W1978488002 cites W2061519262 @default.
• W1978488002 cites W2069519700 @default.
• W1978488002 cites W2080439868 @default.
• W1978488002 doi "https://doi.org/10.1088/0953-8984/6/1/001" @default.
• W1978488002 hasPublicationYear "1994" @default.
• W1978488002 type Work @default.
• W1978488002 sameAs 1978488002 @default.
• W1978488002 citedByCount "4" @default.
• W1978488002 countsByYear W19784880022023 @default.
• W1978488002 crossrefType "journal-article" @default.
• W1978488002 hasAuthorship W1978488002A5000235425 @default.
• W1978488002 hasAuthorship W1978488002A5020448333 @default.
• W1978488002 hasAuthorship W1978488002A5048108410 @default.
• W1978488002 hasAuthorship W1978488002A5059038215 @default.
• W1978488002 hasAuthorship W1978488002A5080547758 @default.
• W1978488002 hasConcept C100460472 @default.
• W1978488002 hasConcept C113196181 @default.
• W1978488002 hasConcept C120665830 @default.
• W1978488002 hasConcept C121332964 @default.
• W1978488002 hasConcept C130472188 @default.
• W1978488002 hasConcept C147789679 @default.
• W1978488002 hasConcept C169573571 @default.
• W1978488002 hasConcept C171250308 @default.
• W1978488002 hasConcept C178790620 @default.
• W1978488002 hasConcept C185592680 @default.
• W1978488002 hasConcept C192562407 @default.
• W1978488002 hasConcept C2775913835 @default.
• W1978488002 hasConcept C2776390347 @default.
• W1978488002 hasConcept C2777822432 @default.
• W1978488002 hasConcept C2779227376 @default.
• W1978488002 hasConcept C2779667780 @default.
• W1978488002 hasConcept C40003534 @default.
• W1978488002 hasConcept C43617362 @default.
• W1978488002 hasConcept C49040817 @default.
• W1978488002 hasConcept C544956773 @default.
• W1978488002 hasConcept C56052488 @default.
• W1978488002 hasConcept C62520636 @default.
• W1978488002 hasConcept C80086925 @default.
• W1978488002 hasConcept C8010536 @default.
• W1978488002 hasConcept C82706917 @default.
• W1978488002 hasConceptScore W1978488002C100460472 @default.
• W1978488002 hasConceptScore W1978488002C113196181 @default.
• W1978488002 hasConceptScore W1978488002C120665830 @default.
• W1978488002 hasConceptScore W1978488002C121332964 @default.
• W1978488002 hasConceptScore W1978488002C130472188 @default.
• W1978488002 hasConceptScore W1978488002C147789679 @default.
• W1978488002 hasConceptScore W1978488002C169573571 @default.
• W1978488002 hasConceptScore W1978488002C171250308 @default.
• W1978488002 hasConceptScore W1978488002C178790620 @default.
• W1978488002 hasConceptScore W1978488002C185592680 @default.
• W1978488002 hasConceptScore W1978488002C192562407 @default.
• W1978488002 hasConceptScore W1978488002C2775913835 @default.
• W1978488002 hasConceptScore W1978488002C2776390347 @default.
• W1978488002 hasConceptScore W1978488002C2777822432 @default.
• W1978488002 hasConceptScore W1978488002C2779227376 @default.
• W1978488002 hasConceptScore W1978488002C2779667780 @default.
• W1978488002 hasConceptScore W1978488002C40003534 @default.
• W1978488002 hasConceptScore W1978488002C43617362 @default.
• W1978488002 hasConceptScore W1978488002C49040817 @default.
• W1978488002 hasConceptScore W1978488002C544956773 @default.
• W1978488002 hasConceptScore W1978488002C56052488 @default.
• W1978488002 hasConceptScore W1978488002C62520636 @default.
• W1978488002 hasConceptScore W1978488002C80086925 @default.
• W1978488002 hasConceptScore W1978488002C8010536 @default.
• W1978488002 hasConceptScore W1978488002C82706917 @default.
• W1978488002 hasIssue "1" @default.
• W1978488002 hasLocation W19784880021 @default.
• W1978488002 hasOpenAccess W1978488002 @default.
• W1978488002 hasPrimaryLocation W19784880021 @default.
• W1978488002 hasRelatedWork W1979089580 @default.
• W1978488002 hasRelatedWork W1991963772 @default.
• W1978488002 hasRelatedWork W2009819460 @default.
• W1978488002 hasRelatedWork W2013783467 @default.
• W1978488002 hasRelatedWork W2017099024 @default.
• W1978488002 hasRelatedWork W2026948001 @default.
• W1978488002 hasRelatedWork W2061728122 @default.
• W1978488002 hasRelatedWork W2078681631 @default.

• next