Matches in SemOpenAlex for { <https://semopenalex.org/work/W1978488565> ?p ?o ?g. }
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- W1978488565 endingPage "4666" @default.
- W1978488565 startingPage "4666" @default.
- W1978488565 abstract "Usually, semi-insulating polycrystalline silicon films SiO x are obtained from the chemical decomposition of silane and nitrous oxide. In this paper we describe the study of semi-insulating polycrystalline silicon (SIPOS) films from disilane and nitrous oxide by low pressure chemical vapour deposition. The kinetics of growth and the variation of oxygen content have been investigated relatively to deposition parameters such as temperature, total pressure and gas flow ratio. The oxygen content is assessed by X-ray photoelectron spectroscopy (XPS) and by differential thickness method. We show that the growth rate is higher for “disilane SIPOS films” than “silane SIPOS films” and we explain this behaviour by the strong difference in growth rate of silylene species. We also show that the inhibition effect of nitrous oxide on the growth rate is very low in the case of SIPOS films obtained with disilane. The electrical resistivity depends on the oxygen content and is ranged between 10 9 and 10 13 Ω· cm." @default.
- W1978488565 created "2016-06-24" @default.
- W1978488565 creator A5014113718 @default.
- W1978488565 creator A5021746581 @default.
- W1978488565 creator A5042301271 @default.
- W1978488565 creator A5063174358 @default.
- W1978488565 date "1995-09-01" @default.
- W1978488565 modified "2023-10-12" @default.
- W1978488565 title "Semi-Insulating Polycrystalline Silicon by Low Pressure Chemical Vapour Deposition from Disilane and Nitrous Oxide" @default.
- W1978488565 cites W1488035457 @default.
- W1978488565 cites W1603995447 @default.
- W1978488565 cites W1975868821 @default.
- W1978488565 cites W2000583432 @default.
- W1978488565 cites W2002427896 @default.
- W1978488565 cites W2008160021 @default.
- W1978488565 cites W2011063545 @default.
- W1978488565 cites W2012899125 @default.
- W1978488565 cites W2033320812 @default.
- W1978488565 cites W2034976241 @default.
- W1978488565 cites W2035777724 @default.
- W1978488565 cites W2050836775 @default.
- W1978488565 cites W2093291223 @default.
- W1978488565 cites W2140562518 @default.
- W1978488565 cites W2320792885 @default.
- W1978488565 cites W2575789860 @default.
- W1978488565 cites W4254442902 @default.
- W1978488565 doi "https://doi.org/10.1143/jjap.34.4666" @default.
- W1978488565 hasPublicationYear "1995" @default.
- W1978488565 type Work @default.
- W1978488565 sameAs 1978488565 @default.
- W1978488565 citedByCount "5" @default.
- W1978488565 crossrefType "journal-article" @default.
- W1978488565 hasAuthorship W1978488565A5014113718 @default.
- W1978488565 hasAuthorship W1978488565A5021746581 @default.
- W1978488565 hasAuthorship W1978488565A5042301271 @default.
- W1978488565 hasAuthorship W1978488565A5063174358 @default.
- W1978488565 hasConcept C107872376 @default.
- W1978488565 hasConcept C113196181 @default.
- W1978488565 hasConcept C127413603 @default.
- W1978488565 hasConcept C137637335 @default.
- W1978488565 hasConcept C175708663 @default.
- W1978488565 hasConcept C178790620 @default.
- W1978488565 hasConcept C185592680 @default.
- W1978488565 hasConcept C192562407 @default.
- W1978488565 hasConcept C2776259327 @default.
- W1978488565 hasConcept C2777573673 @default.
- W1978488565 hasConcept C2778024649 @default.
- W1978488565 hasConcept C2779227376 @default.
- W1978488565 hasConcept C2779851234 @default.
- W1978488565 hasConcept C2780565262 @default.
- W1978488565 hasConcept C42360764 @default.
- W1978488565 hasConcept C544956773 @default.
- W1978488565 hasConcept C57410435 @default.
- W1978488565 hasConcept C8010536 @default.
- W1978488565 hasConcept C87359718 @default.
- W1978488565 hasConceptScore W1978488565C107872376 @default.
- W1978488565 hasConceptScore W1978488565C113196181 @default.
- W1978488565 hasConceptScore W1978488565C127413603 @default.
- W1978488565 hasConceptScore W1978488565C137637335 @default.
- W1978488565 hasConceptScore W1978488565C175708663 @default.
- W1978488565 hasConceptScore W1978488565C178790620 @default.
- W1978488565 hasConceptScore W1978488565C185592680 @default.
- W1978488565 hasConceptScore W1978488565C192562407 @default.
- W1978488565 hasConceptScore W1978488565C2776259327 @default.
- W1978488565 hasConceptScore W1978488565C2777573673 @default.
- W1978488565 hasConceptScore W1978488565C2778024649 @default.
- W1978488565 hasConceptScore W1978488565C2779227376 @default.
- W1978488565 hasConceptScore W1978488565C2779851234 @default.
- W1978488565 hasConceptScore W1978488565C2780565262 @default.
- W1978488565 hasConceptScore W1978488565C42360764 @default.
- W1978488565 hasConceptScore W1978488565C544956773 @default.
- W1978488565 hasConceptScore W1978488565C57410435 @default.
- W1978488565 hasConceptScore W1978488565C8010536 @default.
- W1978488565 hasConceptScore W1978488565C87359718 @default.
- W1978488565 hasIssue "9R" @default.
- W1978488565 hasLocation W19784885651 @default.
- W1978488565 hasOpenAccess W1978488565 @default.
- W1978488565 hasPrimaryLocation W19784885651 @default.
- W1978488565 hasRelatedWork W1517164421 @default.
- W1978488565 hasRelatedWork W1973075598 @default.
- W1978488565 hasRelatedWork W2020607340 @default.
- W1978488565 hasRelatedWork W2035941124 @default.
- W1978488565 hasRelatedWork W2044612484 @default.
- W1978488565 hasRelatedWork W2067985998 @default.
- W1978488565 hasRelatedWork W2081260999 @default.
- W1978488565 hasRelatedWork W2090316086 @default.
- W1978488565 hasRelatedWork W2489665421 @default.
- W1978488565 hasRelatedWork W2950029066 @default.
- W1978488565 hasVolume "34" @default.
- W1978488565 isParatext "false" @default.
- W1978488565 isRetracted "false" @default.
- W1978488565 magId "1978488565" @default.
- W1978488565 workType "article" @default.