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- W1978561258 abstract "The National Institute of Standards and Technology (NIST) has a multifaceted program in atomic force microscope (AFM) dimensional metrology. One component of this effort is a custom in-house metrology AFM, called the calibrated AFM (C-AFM). The NIST C-AFM has displacement metrology for all three axes traceable to the 633 nm wavelength of the iodine-stabilized He-Ne laser. A second major component of this program, and the focus of this paper, is the use of critical dimension atomic force microscopy (CD-AFM). CD-AFM is a commercially available AFM technology that uses flared tips and twodimensional surface sensing to scan the sidewalls of near-vertical or even reentrant features. Features of this sort are commonly encountered in semiconductor manufacturing and other nanotechnology industries. NIST has experience in the calibration and characterization of CD-AFM instruments and in the development of uncertainty budgets for typical measurands in semiconductor manufacturing metrology. A third generation CD-AFM was recently installed at NIST. The current performance of this instrument for pitch and height measurements appears to support our relative expanded uncertainty (k = 2) goals in the range of 1.0 × 10<sup>-3</sup> down to 1.0 × 10<sup>-4</sup>." @default.
- W1978561258 created "2016-06-24" @default.
- W1978561258 creator A5046451500 @default.
- W1978561258 creator A5049265638 @default.
- W1978561258 creator A5059563495 @default.
- W1978561258 creator A5072093705 @default.
- W1978561258 date "2011-05-13" @default.
- W1978561258 modified "2023-10-16" @default.
- W1978561258 title "Traceable calibration of a critical dimension atomic force microscope" @default.
- W1978561258 doi "https://doi.org/10.1117/12.887290" @default.
- W1978561258 hasPublicationYear "2011" @default.
- W1978561258 type Work @default.
- W1978561258 sameAs 1978561258 @default.
- W1978561258 citedByCount "2" @default.
- W1978561258 countsByYear W19785612582012 @default.
- W1978561258 countsByYear W19785612582018 @default.
- W1978561258 crossrefType "proceedings-article" @default.
- W1978561258 hasAuthorship W1978561258A5046451500 @default.
- W1978561258 hasAuthorship W1978561258A5049265638 @default.
- W1978561258 hasAuthorship W1978561258A5059563495 @default.
- W1978561258 hasAuthorship W1978561258A5072093705 @default.
- W1978561258 hasConcept C102951782 @default.
- W1978561258 hasConcept C111219384 @default.
- W1978561258 hasConcept C120665830 @default.
- W1978561258 hasConcept C121332964 @default.
- W1978561258 hasConcept C137209882 @default.
- W1978561258 hasConcept C148402106 @default.
- W1978561258 hasConcept C165838908 @default.
- W1978561258 hasConcept C165880335 @default.
- W1978561258 hasConcept C171250308 @default.
- W1978561258 hasConcept C192562407 @default.
- W1978561258 hasConcept C195766429 @default.
- W1978561258 hasConcept C204321447 @default.
- W1978561258 hasConcept C207789793 @default.
- W1978561258 hasConcept C2780841128 @default.
- W1978561258 hasConcept C41008148 @default.
- W1978561258 hasConcept C62520636 @default.
- W1978561258 hasConcept C67649825 @default.
- W1978561258 hasConceptScore W1978561258C102951782 @default.
- W1978561258 hasConceptScore W1978561258C111219384 @default.
- W1978561258 hasConceptScore W1978561258C120665830 @default.
- W1978561258 hasConceptScore W1978561258C121332964 @default.
- W1978561258 hasConceptScore W1978561258C137209882 @default.
- W1978561258 hasConceptScore W1978561258C148402106 @default.
- W1978561258 hasConceptScore W1978561258C165838908 @default.
- W1978561258 hasConceptScore W1978561258C165880335 @default.
- W1978561258 hasConceptScore W1978561258C171250308 @default.
- W1978561258 hasConceptScore W1978561258C192562407 @default.
- W1978561258 hasConceptScore W1978561258C195766429 @default.
- W1978561258 hasConceptScore W1978561258C204321447 @default.
- W1978561258 hasConceptScore W1978561258C207789793 @default.
- W1978561258 hasConceptScore W1978561258C2780841128 @default.
- W1978561258 hasConceptScore W1978561258C41008148 @default.
- W1978561258 hasConceptScore W1978561258C62520636 @default.
- W1978561258 hasConceptScore W1978561258C67649825 @default.
- W1978561258 hasLocation W19785612581 @default.
- W1978561258 hasOpenAccess W1978561258 @default.
- W1978561258 hasPrimaryLocation W19785612581 @default.
- W1978561258 hasRelatedWork W13365175 @default.
- W1978561258 hasRelatedWork W1951376077 @default.
- W1978561258 hasRelatedWork W1972100080 @default.
- W1978561258 hasRelatedWork W1974136804 @default.
- W1978561258 hasRelatedWork W1978561258 @default.
- W1978561258 hasRelatedWork W1983941894 @default.
- W1978561258 hasRelatedWork W1999984697 @default.
- W1978561258 hasRelatedWork W2053769150 @default.
- W1978561258 hasRelatedWork W2144162940 @default.
- W1978561258 hasRelatedWork W2389089068 @default.
- W1978561258 isParatext "false" @default.
- W1978561258 isRetracted "false" @default.
- W1978561258 magId "1978561258" @default.
- W1978561258 workType "article" @default.