Matches in SemOpenAlex for { <https://semopenalex.org/work/W1978568085> ?p ?o ?g. }
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- W1978568085 endingPage "652" @default.
- W1978568085 startingPage "645" @default.
- W1978568085 abstract "Abstract Aluminum oxide films were deposited using remote plasma‐enhanced metalorganic chemical vapor deposition from oxygen/trimethylaluminum mixtures. Initial studies by in situ spectroscopic ellipsometry demonstrated that the aluminum oxide films deposited at temperatures <150 °C were porous. The low refractive index of 1.38 was found to increase to 1.52 under ambient conditions, due to ageing. In order to improve the film properties, two routes were explored. First, by increasing the substrate temperature films with a refractive index of 1.48 were obtained at 400 °C, accompanied by a strong decrease in OH concentration, as shown by infrared spectroscopy. Second, by applying an additional rf bias to the substrate the in situ refractive index increased up to 1.60 and the OH groups were quantitatively removed. magnified image" @default.
- W1978568085 created "2016-06-24" @default.
- W1978568085 creator A5042598707 @default.
- W1978568085 creator A5050116281 @default.
- W1978568085 creator A5078580218 @default.
- W1978568085 creator A5082522882 @default.
- W1978568085 date "2008-09-03" @default.
- W1978568085 modified "2023-10-10" @default.
- W1978568085 title "Remote Plasma-Enhanced Metalorganic Chemical Vapor Deposition of Aluminum Oxide Thin Films" @default.
- W1978568085 cites W2080150303 @default.
- W1978568085 doi "https://doi.org/10.1002/ppap.200700164" @default.
- W1978568085 hasPublicationYear "2008" @default.
- W1978568085 type Work @default.
- W1978568085 sameAs 1978568085 @default.
- W1978568085 citedByCount "7" @default.
- W1978568085 countsByYear W19785680852012 @default.
- W1978568085 countsByYear W19785680852013 @default.
- W1978568085 countsByYear W19785680852014 @default.
- W1978568085 crossrefType "journal-article" @default.
- W1978568085 hasAuthorship W1978568085A5042598707 @default.
- W1978568085 hasAuthorship W1978568085A5050116281 @default.
- W1978568085 hasAuthorship W1978568085A5078580218 @default.
- W1978568085 hasAuthorship W1978568085A5082522882 @default.
- W1978568085 hasBestOaLocation W19785680851 @default.
- W1978568085 hasConcept C111368507 @default.
- W1978568085 hasConcept C113196181 @default.
- W1978568085 hasConcept C127313418 @default.
- W1978568085 hasConcept C151730666 @default.
- W1978568085 hasConcept C159985019 @default.
- W1978568085 hasConcept C171250308 @default.
- W1978568085 hasConcept C178790620 @default.
- W1978568085 hasConcept C18293161 @default.
- W1978568085 hasConcept C185592680 @default.
- W1978568085 hasConcept C19067145 @default.
- W1978568085 hasConcept C191897082 @default.
- W1978568085 hasConcept C192562407 @default.
- W1978568085 hasConcept C2777289219 @default.
- W1978568085 hasConcept C2779851234 @default.
- W1978568085 hasConcept C2780740191 @default.
- W1978568085 hasConcept C2816523 @default.
- W1978568085 hasConcept C42067758 @default.
- W1978568085 hasConcept C49040817 @default.
- W1978568085 hasConcept C513153333 @default.
- W1978568085 hasConcept C540031477 @default.
- W1978568085 hasConcept C57410435 @default.
- W1978568085 hasConcept C64297162 @default.
- W1978568085 hasConcept C86803240 @default.
- W1978568085 hasConceptScore W1978568085C111368507 @default.
- W1978568085 hasConceptScore W1978568085C113196181 @default.
- W1978568085 hasConceptScore W1978568085C127313418 @default.
- W1978568085 hasConceptScore W1978568085C151730666 @default.
- W1978568085 hasConceptScore W1978568085C159985019 @default.
- W1978568085 hasConceptScore W1978568085C171250308 @default.
- W1978568085 hasConceptScore W1978568085C178790620 @default.
- W1978568085 hasConceptScore W1978568085C18293161 @default.
- W1978568085 hasConceptScore W1978568085C185592680 @default.
- W1978568085 hasConceptScore W1978568085C19067145 @default.
- W1978568085 hasConceptScore W1978568085C191897082 @default.
- W1978568085 hasConceptScore W1978568085C192562407 @default.
- W1978568085 hasConceptScore W1978568085C2777289219 @default.
- W1978568085 hasConceptScore W1978568085C2779851234 @default.
- W1978568085 hasConceptScore W1978568085C2780740191 @default.
- W1978568085 hasConceptScore W1978568085C2816523 @default.
- W1978568085 hasConceptScore W1978568085C42067758 @default.
- W1978568085 hasConceptScore W1978568085C49040817 @default.
- W1978568085 hasConceptScore W1978568085C513153333 @default.
- W1978568085 hasConceptScore W1978568085C540031477 @default.
- W1978568085 hasConceptScore W1978568085C57410435 @default.
- W1978568085 hasConceptScore W1978568085C64297162 @default.
- W1978568085 hasConceptScore W1978568085C86803240 @default.
- W1978568085 hasIssue "7" @default.
- W1978568085 hasLocation W19785680851 @default.
- W1978568085 hasOpenAccess W1978568085 @default.
- W1978568085 hasPrimaryLocation W19785680851 @default.
- W1978568085 hasRelatedWork W2036410671 @default.
- W1978568085 hasRelatedWork W2055039974 @default.
- W1978568085 hasRelatedWork W2100931161 @default.
- W1978568085 hasRelatedWork W2115274069 @default.
- W1978568085 hasRelatedWork W2153056196 @default.
- W1978568085 hasRelatedWork W2323183992 @default.
- W1978568085 hasRelatedWork W2330222589 @default.
- W1978568085 hasRelatedWork W2330366874 @default.
- W1978568085 hasRelatedWork W2560326741 @default.
- W1978568085 hasRelatedWork W4321450167 @default.
- W1978568085 hasVolume "5" @default.
- W1978568085 isParatext "false" @default.
- W1978568085 isRetracted "false" @default.
- W1978568085 magId "1978568085" @default.
- W1978568085 workType "article" @default.