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- W1978588418 abstract "A program was undertaken to evaluate FTIR for use in monitoring acid and solvent stacks in the semiconductor industry. The program consisted of an initial laboratory feasibility effort followed by field testing and ultimately a system development program. The clear result of the feasibility and field tests was that FTIR is an appropriate technology for use with these sources. In this paper we present the details of the laboratory and field tests and briefly outline the system that was developed as a result of the program. 12" @default.
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- W1978588418 date "1995-02-10" @default.
- W1978588418 modified "2023-09-23" @default.
- W1978588418 title "Application of FTIR to semiconductor emissions monitoring" @default.
- W1978588418 doi "https://doi.org/10.1117/12.205562" @default.
- W1978588418 hasPublicationYear "1995" @default.
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