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- W1978608112 abstract "We have analyzed and compared the resolved shear stresses of all 12 glide systems for the 60° dislocation for 〈110〉-aligned and 〈100〉-aligned isolation trenches. From among the 12 glide systems, we select for each trench alignment the one which exhibits the highest stress level. The results for the two alignments are then compared. We find that the largest resolved shear stress for a 〈110〉-oriented trench is about 30% more than that for a 〈100〉-oriented trench from both the isotropic and the anisotropic analyses. Other factors that may cause a reduction of dislocation density for the 〈100〉-trench alignment are also discussed." @default.
- W1978608112 created "2016-06-24" @default.
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- W1978608112 date "1992-08-17" @default.
- W1978608112 modified "2023-09-27" @default.
- W1978608112 title "Effect of crystallographic alignment of isolation trenches: A resolved-shear-stress perspective" @default.
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- W1978608112 doi "https://doi.org/10.1063/1.107797" @default.
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