Matches in SemOpenAlex for { <https://semopenalex.org/work/W1978655896> ?p ?o ?g. }
Showing items 1 to 68 of
68
with 100 items per page.
- W1978655896 abstract "As semiconductor manufacturing moves to the 90nm node and below, shrinking feature sizes and increasing IC complexity have combined to significantly stretch out the time needed to optimize and qualify process anchored OPC models and recipes. Process distortion and non-linearity become non-trivial issues and conspire to reduce the quality of the resulting corrections. Additionally, optimizing the OPC model and recipe on a limited set of test chip designs may not provide sufficient coverage across the range of designs to be produced in the process. Finally, the increased complexity of the transformation of the target pattern into a corrected mask pattern also increases the probability of system lithography errors. Fatal errors (pinch or bridge) or poor CD distribution may still occur. As a result, more than one reticle tape-out cycle is non uncommon to prove models and recipes that approach the center of process for a range of designs. In this paper, we describe a full-chip simulation based verification flow using a commercialized product that serves both OPC model and recipe development as well as post OPC verification after production release of the OPC." @default.
- W1978655896 created "2016-06-24" @default.
- W1978655896 creator A5028604270 @default.
- W1978655896 creator A5036007961 @default.
- W1978655896 creator A5044319868 @default.
- W1978655896 creator A5046879556 @default.
- W1978655896 creator A5050518515 @default.
- W1978655896 date "2005-01-27" @default.
- W1978655896 modified "2023-09-23" @default.
- W1978655896 title "Increasing post OPC layout verification coverage using a full-chip simulation based verification method" @default.
- W1978655896 doi "https://doi.org/10.1117/12.572711" @default.
- W1978655896 hasPublicationYear "2005" @default.
- W1978655896 type Work @default.
- W1978655896 sameAs 1978655896 @default.
- W1978655896 citedByCount "4" @default.
- W1978655896 countsByYear W19786558962015 @default.
- W1978655896 countsByYear W19786558962016 @default.
- W1978655896 crossrefType "proceedings-article" @default.
- W1978655896 hasAuthorship W1978655896A5028604270 @default.
- W1978655896 hasAuthorship W1978655896A5036007961 @default.
- W1978655896 hasAuthorship W1978655896A5044319868 @default.
- W1978655896 hasAuthorship W1978655896A5046879556 @default.
- W1978655896 hasAuthorship W1978655896A5050518515 @default.
- W1978655896 hasConcept C111919701 @default.
- W1978655896 hasConcept C119599485 @default.
- W1978655896 hasConcept C127413603 @default.
- W1978655896 hasConcept C146617872 @default.
- W1978655896 hasConcept C160671074 @default.
- W1978655896 hasConcept C165005293 @default.
- W1978655896 hasConcept C2777441419 @default.
- W1978655896 hasConcept C41008148 @default.
- W1978655896 hasConcept C62611344 @default.
- W1978655896 hasConcept C66938386 @default.
- W1978655896 hasConcept C76155785 @default.
- W1978655896 hasConcept C78371743 @default.
- W1978655896 hasConcept C93389723 @default.
- W1978655896 hasConcept C98045186 @default.
- W1978655896 hasConceptScore W1978655896C111919701 @default.
- W1978655896 hasConceptScore W1978655896C119599485 @default.
- W1978655896 hasConceptScore W1978655896C127413603 @default.
- W1978655896 hasConceptScore W1978655896C146617872 @default.
- W1978655896 hasConceptScore W1978655896C160671074 @default.
- W1978655896 hasConceptScore W1978655896C165005293 @default.
- W1978655896 hasConceptScore W1978655896C2777441419 @default.
- W1978655896 hasConceptScore W1978655896C41008148 @default.
- W1978655896 hasConceptScore W1978655896C62611344 @default.
- W1978655896 hasConceptScore W1978655896C66938386 @default.
- W1978655896 hasConceptScore W1978655896C76155785 @default.
- W1978655896 hasConceptScore W1978655896C78371743 @default.
- W1978655896 hasConceptScore W1978655896C93389723 @default.
- W1978655896 hasConceptScore W1978655896C98045186 @default.
- W1978655896 hasLocation W19786558961 @default.
- W1978655896 hasOpenAccess W1978655896 @default.
- W1978655896 hasPrimaryLocation W19786558961 @default.
- W1978655896 hasRelatedWork W1860397081 @default.
- W1978655896 hasRelatedWork W1970385675 @default.
- W1978655896 hasRelatedWork W2024232867 @default.
- W1978655896 hasRelatedWork W2060300453 @default.
- W1978655896 hasRelatedWork W2133739533 @default.
- W1978655896 hasRelatedWork W2135660832 @default.
- W1978655896 hasRelatedWork W2162176082 @default.
- W1978655896 hasRelatedWork W2375332438 @default.
- W1978655896 hasRelatedWork W2392562125 @default.
- W1978655896 hasRelatedWork W2745198356 @default.
- W1978655896 isParatext "false" @default.
- W1978655896 isRetracted "false" @default.
- W1978655896 magId "1978655896" @default.
- W1978655896 workType "article" @default.