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- W1978691323 abstract "In this research, uniformity of temperature on wafer in fine scale was investigated. A measurement system has been developed, and a sensor as thin-film thermocouple was fabricated using a lift-off process. To generate EMF voltage by Seebeck effect, Chromel and Alumel materials were used for the thermocouple. The system obtains the micro scale temperature from multi-points on the surface of the wafer and then precisely analyzes thermal distribution. A numerical analysis was performed to compare to the measurement method. The experimental results and the analysis shows the system can be used for thermal measurement in a micro scale." @default.
- W1978691323 created "2016-06-24" @default.
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- W1978691323 date "2013-11-15" @default.
- W1978691323 modified "2023-09-27" @default.
- W1978691323 title "Micro-Scale Thermal Sensor Manufacturing and Measurement of Temperature Uniformity on Wafer Surface" @default.
- W1978691323 doi "https://doi.org/10.1115/imece2013-65537" @default.
- W1978691323 hasPublicationYear "2013" @default.
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