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• W1978720965 abstract "We report on a wafer scale fabrication of graphene based field effect transistors (GFETs) for use in future radio frequency (RF) and sensor applications. The process is also almost entirely CMOS compatible and uses a scalable graphene transfer method that can be incorporated in standard CMOS back end of the line (BEOL) process flows. Such a process can be used to integrate high speed GFET devices and graphene sensors with silicon CMOS circuits." @default.
• W1978720965 created "2016-06-24" @default.
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• W1978720965 date "2014-04-01" @default.
• W1978720965 modified "2023-10-11" @default.
• W1978720965 title "Wafer scale graphene transfer for back end of the line device integration" @default.
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• W1978720965 doi "https://doi.org/10.1109/ulis.2014.6813898" @default.
• W1978720965 hasPublicationYear "2014" @default.
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