Matches in SemOpenAlex for { <https://semopenalex.org/work/W1978751451> ?p ?o ?g. }
- W1978751451 abstract "We report a nanolithography technique for the high aspect-ratio nanostructure manufacturing using DODE (double oxide deposition and etching) process. Conventional microfabrication processes are integrated to manufacture nanostructure arrays with sub-100 nm of linewidth. This lithography method is developed to overcome resolution limits of photolithography. High aspect-ratio nanostructures with sub-100 nm of lindewidth were fabricated on wafer-scale substrate without nanolithography techniques. The DODE lithography process presented enabled to pave a way to overcome limitations of nanolithography processes and allowed to manufacture large-scale nanostructures using photolithography and thin film deposition and dry etching processes." @default.
- W1978751451 created "2016-06-24" @default.
- W1978751451 creator A5002442167 @default.
- W1978751451 creator A5026626879 @default.
- W1978751451 creator A5039910063 @default.
- W1978751451 creator A5050512318 @default.
- W1978751451 creator A5064605300 @default.
- W1978751451 creator A5065578638 @default.
- W1978751451 date "2013-07-15" @default.
- W1978751451 modified "2023-09-23" @default.
- W1978751451 title "Double oxide deposition and etching nanolithography for wafer-scale nanopatterning with high-aspect-ratio using photolithography" @default.
- W1978751451 cites W1501261314 @default.
- W1978751451 cites W1549039982 @default.
- W1978751451 cites W1967279041 @default.
- W1978751451 cites W1974140104 @default.
- W1978751451 cites W1991117616 @default.
- W1978751451 cites W1994179563 @default.
- W1978751451 cites W1997173697 @default.
- W1978751451 cites W1998892730 @default.
- W1978751451 cites W2004169991 @default.
- W1978751451 cites W2014685952 @default.
- W1978751451 cites W2021826257 @default.
- W1978751451 cites W2022532332 @default.
- W1978751451 cites W2036316454 @default.
- W1978751451 cites W2037537680 @default.
- W1978751451 cites W2038282958 @default.
- W1978751451 cites W2042489539 @default.
- W1978751451 cites W2045302304 @default.
- W1978751451 cites W2045562812 @default.
- W1978751451 cites W2047240388 @default.
- W1978751451 cites W2051827812 @default.
- W1978751451 cites W2052264879 @default.
- W1978751451 cites W2056435370 @default.
- W1978751451 cites W2060917184 @default.
- W1978751451 cites W2069178649 @default.
- W1978751451 cites W2088819435 @default.
- W1978751451 cites W2096168689 @default.
- W1978751451 cites W2106940596 @default.
- W1978751451 cites W2111173832 @default.
- W1978751451 cites W2113236375 @default.
- W1978751451 cites W2123015577 @default.
- W1978751451 cites W2126297552 @default.
- W1978751451 cites W2139246110 @default.
- W1978751451 cites W2143287675 @default.
- W1978751451 cites W2150952982 @default.
- W1978751451 cites W2611763148 @default.
- W1978751451 cites W4230231993 @default.
- W1978751451 cites W4247419735 @default.
- W1978751451 cites W4366716086 @default.
- W1978751451 cites W1979551234 @default.
- W1978751451 doi "https://doi.org/10.1063/1.4813738" @default.
- W1978751451 hasPublicationYear "2013" @default.
- W1978751451 type Work @default.
- W1978751451 sameAs 1978751451 @default.
- W1978751451 citedByCount "3" @default.
- W1978751451 countsByYear W19787514512015 @default.
- W1978751451 countsByYear W19787514512018 @default.
- W1978751451 crossrefType "journal-article" @default.
- W1978751451 hasAuthorship W1978751451A5002442167 @default.
- W1978751451 hasAuthorship W1978751451A5026626879 @default.
- W1978751451 hasAuthorship W1978751451A5039910063 @default.
- W1978751451 hasAuthorship W1978751451A5050512318 @default.
- W1978751451 hasAuthorship W1978751451A5064605300 @default.
- W1978751451 hasAuthorship W1978751451A5065578638 @default.
- W1978751451 hasConcept C100460472 @default.
- W1978751451 hasConcept C105487726 @default.
- W1978751451 hasConcept C111368507 @default.
- W1978751451 hasConcept C127313418 @default.
- W1978751451 hasConcept C1291036 @default.
- W1978751451 hasConcept C134406635 @default.
- W1978751451 hasConcept C136525101 @default.
- W1978751451 hasConcept C142724271 @default.
- W1978751451 hasConcept C151730666 @default.
- W1978751451 hasConcept C160671074 @default.
- W1978751451 hasConcept C162117346 @default.
- W1978751451 hasConcept C163581340 @default.
- W1978751451 hasConcept C171250308 @default.
- W1978751451 hasConcept C186187911 @default.
- W1978751451 hasConcept C192562407 @default.
- W1978751451 hasConcept C200274948 @default.
- W1978751451 hasConcept C204223013 @default.
- W1978751451 hasConcept C204787440 @default.
- W1978751451 hasConcept C2777289219 @default.
- W1978751451 hasConcept C2779227376 @default.
- W1978751451 hasConcept C2816523 @default.
- W1978751451 hasConcept C41794268 @default.
- W1978751451 hasConcept C49040817 @default.
- W1978751451 hasConcept C527607 @default.
- W1978751451 hasConcept C53524968 @default.
- W1978751451 hasConcept C64297162 @default.
- W1978751451 hasConcept C70520399 @default.
- W1978751451 hasConcept C71924100 @default.
- W1978751451 hasConcept C86803240 @default.
- W1978751451 hasConceptScore W1978751451C100460472 @default.
- W1978751451 hasConceptScore W1978751451C105487726 @default.
- W1978751451 hasConceptScore W1978751451C111368507 @default.
- W1978751451 hasConceptScore W1978751451C127313418 @default.
- W1978751451 hasConceptScore W1978751451C1291036 @default.
- W1978751451 hasConceptScore W1978751451C134406635 @default.
- W1978751451 hasConceptScore W1978751451C136525101 @default.