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- W1978787044 abstract "A preparation of microlens array of the super-spherical glasses by a combination of the photolithography and the Surface-tension Mold (StM) techniques is shown. A super-spherical lens has been gathering much attention because of its function as a Solid Immersion Lens (SIL) with the super-resolution, which circumvents the optical diffraction limit. StM technique enables the preparation of a micrometer-sized SIL (μ-SIL) with the desirable shape, and the obtained SILs realize the optical function. In order to develop the optical micro-devices composed of SILs, μ-SIL array module, the micro-fabrication technique of photolithography is combined with StM technique. Na<sub>2</sub>O-CaO-SiO<sub>2</sub> glass film is attached to glassy-carbon, and etched into glass tiles after the formation of masks by the photolithography. They are heated up to 800<sup>o</sup>C to self-organize into the super-spherical form of the glass droplets. The obtained lens array is found to be composed of the μ-SILs with the uniform radius and thickness." @default.
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- W1978787044 date "2006-02-09" @default.
- W1978787044 modified "2023-09-23" @default.
- W1978787044 title "Fabrication of SIL array of glass by surface-tension mold technique" @default.
- W1978787044 doi "https://doi.org/10.1117/12.647317" @default.
- W1978787044 hasPublicationYear "2006" @default.
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