Matches in SemOpenAlex for { <https://semopenalex.org/work/W1978796324> ?p ?o ?g. }
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- W1978796324 endingPage "195" @default.
- W1978796324 startingPage "192" @default.
- W1978796324 abstract "An integrated 8 × 8 element 3D force sensor array was developed for tactile sensing. The 300 × 300 μm2 sensors are formed from mono-crystalline silicon membranes with spacing of 700 μm. The signals of the individual transducers are read out line-by-line via an on-chip CMOS decoder. The porous silicon bulk micromachining was implemented as one of the final steps of the n-well CMOS compatible processing." @default.
- W1978796324 created "2016-06-24" @default.
- W1978796324 creator A5009992733 @default.
- W1978796324 creator A5017210634 @default.
- W1978796324 creator A5020080147 @default.
- W1978796324 creator A5025610471 @default.
- W1978796324 creator A5062528345 @default.
- W1978796324 creator A5064272315 @default.
- W1978796324 date "2008-03-01" @default.
- W1978796324 modified "2023-10-18" @default.
- W1978796324 title "CMOS integrated tactile sensor array by porous Si bulk micromachining" @default.
- W1978796324 cites W2154352415 @default.
- W1978796324 cites W2161171472 @default.
- W1978796324 cites W2180368845 @default.
- W1978796324 doi "https://doi.org/10.1016/j.sna.2007.08.003" @default.
- W1978796324 hasPublicationYear "2008" @default.
- W1978796324 type Work @default.
- W1978796324 sameAs 1978796324 @default.
- W1978796324 citedByCount "29" @default.
- W1978796324 countsByYear W19787963242012 @default.
- W1978796324 countsByYear W19787963242013 @default.
- W1978796324 countsByYear W19787963242014 @default.
- W1978796324 countsByYear W19787963242015 @default.
- W1978796324 countsByYear W19787963242016 @default.
- W1978796324 countsByYear W19787963242017 @default.
- W1978796324 countsByYear W19787963242018 @default.
- W1978796324 countsByYear W19787963242019 @default.
- W1978796324 countsByYear W19787963242020 @default.
- W1978796324 countsByYear W19787963242021 @default.
- W1978796324 countsByYear W19787963242022 @default.
- W1978796324 crossrefType "journal-article" @default.
- W1978796324 hasAuthorship W1978796324A5009992733 @default.
- W1978796324 hasAuthorship W1978796324A5017210634 @default.
- W1978796324 hasAuthorship W1978796324A5020080147 @default.
- W1978796324 hasAuthorship W1978796324A5025610471 @default.
- W1978796324 hasAuthorship W1978796324A5062528345 @default.
- W1978796324 hasAuthorship W1978796324A5064272315 @default.
- W1978796324 hasConcept C119599485 @default.
- W1978796324 hasConcept C127413603 @default.
- W1978796324 hasConcept C136525101 @default.
- W1978796324 hasConcept C142724271 @default.
- W1978796324 hasConcept C145667562 @default.
- W1978796324 hasConcept C154945302 @default.
- W1978796324 hasConcept C165005293 @default.
- W1978796324 hasConcept C192562407 @default.
- W1978796324 hasConcept C204787440 @default.
- W1978796324 hasConcept C24326235 @default.
- W1978796324 hasConcept C2776685891 @default.
- W1978796324 hasConcept C41008148 @default.
- W1978796324 hasConcept C41075158 @default.
- W1978796324 hasConcept C46362747 @default.
- W1978796324 hasConcept C46722567 @default.
- W1978796324 hasConcept C49040817 @default.
- W1978796324 hasConcept C544956773 @default.
- W1978796324 hasConcept C56318395 @default.
- W1978796324 hasConcept C71924100 @default.
- W1978796324 hasConcept C90509273 @default.
- W1978796324 hasConceptScore W1978796324C119599485 @default.
- W1978796324 hasConceptScore W1978796324C127413603 @default.
- W1978796324 hasConceptScore W1978796324C136525101 @default.
- W1978796324 hasConceptScore W1978796324C142724271 @default.
- W1978796324 hasConceptScore W1978796324C145667562 @default.
- W1978796324 hasConceptScore W1978796324C154945302 @default.
- W1978796324 hasConceptScore W1978796324C165005293 @default.
- W1978796324 hasConceptScore W1978796324C192562407 @default.
- W1978796324 hasConceptScore W1978796324C204787440 @default.
- W1978796324 hasConceptScore W1978796324C24326235 @default.
- W1978796324 hasConceptScore W1978796324C2776685891 @default.
- W1978796324 hasConceptScore W1978796324C41008148 @default.
- W1978796324 hasConceptScore W1978796324C41075158 @default.
- W1978796324 hasConceptScore W1978796324C46362747 @default.
- W1978796324 hasConceptScore W1978796324C46722567 @default.
- W1978796324 hasConceptScore W1978796324C49040817 @default.
- W1978796324 hasConceptScore W1978796324C544956773 @default.
- W1978796324 hasConceptScore W1978796324C56318395 @default.
- W1978796324 hasConceptScore W1978796324C71924100 @default.
- W1978796324 hasConceptScore W1978796324C90509273 @default.
- W1978796324 hasIssue "1" @default.
- W1978796324 hasLocation W19787963241 @default.
- W1978796324 hasOpenAccess W1978796324 @default.
- W1978796324 hasPrimaryLocation W19787963241 @default.
- W1978796324 hasRelatedWork W1658402459 @default.
- W1978796324 hasRelatedWork W1970826409 @default.
- W1978796324 hasRelatedWork W1978796324 @default.
- W1978796324 hasRelatedWork W2013643275 @default.
- W1978796324 hasRelatedWork W2032214393 @default.
- W1978796324 hasRelatedWork W2050746330 @default.
- W1978796324 hasRelatedWork W2080938150 @default.
- W1978796324 hasRelatedWork W2098591473 @default.
- W1978796324 hasRelatedWork W2363852653 @default.
- W1978796324 hasRelatedWork W2084149570 @default.
- W1978796324 hasVolume "142" @default.
- W1978796324 isParatext "false" @default.
- W1978796324 isRetracted "false" @default.
- W1978796324 magId "1978796324" @default.
- W1978796324 workType "article" @default.