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• W1978819423 endingPage "3455" @default.
• W1978819423 startingPage "3446" @default.
• W1978819423 abstract "We have grown aluminum nitride thin films by ultrahigh vacuum reactive sputter deposition on Si(111) and Si(001) substrates. We show results of film characterization by Raman scattering, ion beam channeling, and transmission electron microscopy, which establish the occurrence of epitaxial growth of wurtzitic aluminum nitride thin films on Si(111) at temperatures above 600 °C. In contrast, microstructural characterization by transmission electron microscopy shows the formation of highly oriented polycrystalline wurtzitic aluminum nitride thin films on Si(001). Real-time substrate curvature measurements reveal the existence of large intrinsic stresses in aluminum nitride thin films grown on both Si(111) and Si(001) substrates." @default.
• W1978819423 created "2016-06-24" @default.
• W1978819423 creator A5049671809 @default.
• W1978819423 creator A5058091855 @default.
• W1978819423 creator A5060688850 @default.
• W1978819423 creator A5068638494 @default.
• W1978819423 creator A5091432856 @default.
• W1978819423 date "1994-04-01" @default.
• W1978819423 modified "2023-10-03" @default.
• W1978819423 title "Growth of aluminum nitride thin films on Si(111) and Si(001): Structural characteristics and development of intrinsic stresses" @default.
• W1978819423 cites W1611893133 @default.
• W1978819423 cites W1632044102 @default.
• W1978819423 cites W1967552090 @default.
• W1978819423 cites W1969378772 @default.
• W1978819423 cites W1973883535 @default.
• W1978819423 cites W1977419538 @default.
• W1978819423 cites W1979319857 @default.
• W1978819423 cites W1983329315 @default.
• W1978819423 cites W1988357484 @default.
• W1978819423 cites W1989908383 @default.
• W1978819423 cites W2000459935 @default.
• W1978819423 cites W2000613422 @default.
• W1978819423 cites W2013578926 @default.
• W1978819423 cites W2017268449 @default.
• W1978819423 cites W2026297043 @default.
• W1978819423 cites W2056741187 @default.
• W1978819423 cites W2059310165 @default.
• W1978819423 cites W2061976368 @default.
• W1978819423 cites W2066100115 @default.
• W1978819423 cites W2073809508 @default.
• W1978819423 cites W2074855887 @default.
• W1978819423 cites W2077808722 @default.
• W1978819423 cites W2085955437 @default.
• W1978819423 cites W2089393927 @default.
• W1978819423 cites W2127076004 @default.
• W1978819423 cites W2140031682 @default.
• W1978819423 cites W2314408520 @default.
• W1978819423 doi "https://doi.org/10.1063/1.356105" @default.
• W1978819423 hasPublicationYear "1994" @default.
• W1978819423 type Work @default.
• W1978819423 sameAs 1978819423 @default.
• W1978819423 citedByCount "88" @default.
• W1978819423 countsByYear W19788194232012 @default.
• W1978819423 countsByYear W19788194232013 @default.
• W1978819423 countsByYear W19788194232014 @default.
• W1978819423 countsByYear W19788194232015 @default.
• W1978819423 countsByYear W19788194232016 @default.
• W1978819423 countsByYear W19788194232017 @default.
• W1978819423 countsByYear W19788194232018 @default.
• W1978819423 countsByYear W19788194232019 @default.
• W1978819423 countsByYear W19788194232020 @default.
• W1978819423 countsByYear W19788194232021 @default.
• W1978819423 crossrefType "journal-article" @default.
• W1978819423 hasAuthorship W1978819423A5049671809 @default.
• W1978819423 hasAuthorship W1978819423A5058091855 @default.
• W1978819423 hasAuthorship W1978819423A5060688850 @default.
• W1978819423 hasAuthorship W1978819423A5068638494 @default.
• W1978819423 hasAuthorship W1978819423A5091432856 @default.
• W1978819423 hasConcept C110738630 @default.
• W1978819423 hasConcept C111368507 @default.
• W1978819423 hasConcept C120665830 @default.
• W1978819423 hasConcept C121332964 @default.
• W1978819423 hasConcept C127313418 @default.
• W1978819423 hasConcept C137637335 @default.
• W1978819423 hasConcept C146088050 @default.
• W1978819423 hasConcept C159985019 @default.
• W1978819423 hasConcept C169573571 @default.
• W1978819423 hasConcept C171250308 @default.
• W1978819423 hasConcept C19067145 @default.
• W1978819423 hasConcept C191897082 @default.
• W1978819423 hasConcept C192562407 @default.
• W1978819423 hasConcept C194760766 @default.
• W1978819423 hasConcept C22423302 @default.
• W1978819423 hasConcept C2777289219 @default.
• W1978819423 hasConcept C2779227376 @default.
• W1978819423 hasConcept C40003534 @default.
• W1978819423 hasConcept C513153333 @default.
• W1978819423 hasConceptScore W1978819423C110738630 @default.
• W1978819423 hasConceptScore W1978819423C111368507 @default.
• W1978819423 hasConceptScore W1978819423C120665830 @default.
• W1978819423 hasConceptScore W1978819423C121332964 @default.
• W1978819423 hasConceptScore W1978819423C127313418 @default.
• W1978819423 hasConceptScore W1978819423C137637335 @default.
• W1978819423 hasConceptScore W1978819423C146088050 @default.
• W1978819423 hasConceptScore W1978819423C159985019 @default.
• W1978819423 hasConceptScore W1978819423C169573571 @default.
• W1978819423 hasConceptScore W1978819423C171250308 @default.
• W1978819423 hasConceptScore W1978819423C19067145 @default.
• W1978819423 hasConceptScore W1978819423C191897082 @default.
• W1978819423 hasConceptScore W1978819423C192562407 @default.
• W1978819423 hasConceptScore W1978819423C194760766 @default.
• W1978819423 hasConceptScore W1978819423C22423302 @default.
• W1978819423 hasConceptScore W1978819423C2777289219 @default.
• W1978819423 hasConceptScore W1978819423C2779227376 @default.
• W1978819423 hasConceptScore W1978819423C40003534 @default.
• W1978819423 hasConceptScore W1978819423C513153333 @default.
• W1978819423 hasIssue "7" @default.
• W1978819423 hasLocation W19788194231 @default.

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