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• W1978869694 abstract "Sub-beam-size focused electron beam-induced etching of amorphous carbon membranes was achieved. The size of the tungsten filament generated electron beam was determined from the in situ stage current monitoring and verified by knife edge measurements. The in situ time resolved stage current measurements as an end point detection allowed the fabrication of nanoholes with a diameter of sub-20nm, corresponding to 20%–40% of the full width at half maximum of the incident beam." @default.
• W1978869694 created "2016-06-24" @default.
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• W1978869694 date "2008-01-28" @default.
• W1978869694 modified "2023-10-18" @default.
• W1978869694 title "Controlled focused electron beam-induced etching for the fabrication of sub-beam-size nanoholes" @default.
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• W1978869694 doi "https://doi.org/10.1063/1.2839334" @default.
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