Matches in SemOpenAlex for { <https://semopenalex.org/work/W1978955079> ?p ?o ?g. }
Showing items 1 to 91 of
91
with 100 items per page.
- W1978955079 endingPage "80" @default.
- W1978955079 startingPage "75" @default.
- W1978955079 abstract "A secondary ion mass spectrometry (SIMS) study has been carried out during ion beam deposition of 10–100 eV CH3+ or CD3+ ions on a Si(111) substrate using a highly sophisticated low-energy ion beam deposition (IBD) apparatus combined with surface analysis systems. Secondary hydrocarbon ions containing up to five carbon atoms were observed to be produced. Results obtained with CD3+ ions showed that both ion deposition and secondary ion formation processes are different above and below an incident ion energy of 30 eV." @default.
- W1978955079 created "2016-06-24" @default.
- W1978955079 creator A5017474769 @default.
- W1978955079 creator A5058073765 @default.
- W1978955079 creator A5085825116 @default.
- W1978955079 date "1996-01-01" @default.
- W1978955079 modified "2023-09-27" @default.
- W1978955079 title "A SIMS study on secondary ion formation during low-energy methyl ion beam deposition" @default.
- W1978955079 cites W2023341270 @default.
- W1978955079 cites W2048051641 @default.
- W1978955079 cites W2070316717 @default.
- W1978955079 cites W2076525929 @default.
- W1978955079 cites W2084978654 @default.
- W1978955079 doi "https://doi.org/10.1016/0168-583x(95)00872-1" @default.
- W1978955079 hasPublicationYear "1996" @default.
- W1978955079 type Work @default.
- W1978955079 sameAs 1978955079 @default.
- W1978955079 citedByCount "1" @default.
- W1978955079 crossrefType "journal-article" @default.
- W1978955079 hasAuthorship W1978955079A5017474769 @default.
- W1978955079 hasAuthorship W1978955079A5058073765 @default.
- W1978955079 hasAuthorship W1978955079A5085825116 @default.
- W1978955079 hasConcept C109486029 @default.
- W1978955079 hasConcept C113196181 @default.
- W1978955079 hasConcept C121332964 @default.
- W1978955079 hasConcept C145148216 @default.
- W1978955079 hasConcept C146088050 @default.
- W1978955079 hasConcept C151730666 @default.
- W1978955079 hasConcept C162356407 @default.
- W1978955079 hasConcept C171250308 @default.
- W1978955079 hasConcept C178790620 @default.
- W1978955079 hasConcept C184779094 @default.
- W1978955079 hasConcept C185592680 @default.
- W1978955079 hasConcept C187529661 @default.
- W1978955079 hasConcept C188224857 @default.
- W1978955079 hasConcept C192562407 @default.
- W1978955079 hasConcept C193016168 @default.
- W1978955079 hasConcept C2781463530 @default.
- W1978955079 hasConcept C2816523 @default.
- W1978955079 hasConcept C43617362 @default.
- W1978955079 hasConcept C50774322 @default.
- W1978955079 hasConcept C64297162 @default.
- W1978955079 hasConcept C77671233 @default.
- W1978955079 hasConcept C79176676 @default.
- W1978955079 hasConcept C86803240 @default.
- W1978955079 hasConcept C93106096 @default.
- W1978955079 hasConceptScore W1978955079C109486029 @default.
- W1978955079 hasConceptScore W1978955079C113196181 @default.
- W1978955079 hasConceptScore W1978955079C121332964 @default.
- W1978955079 hasConceptScore W1978955079C145148216 @default.
- W1978955079 hasConceptScore W1978955079C146088050 @default.
- W1978955079 hasConceptScore W1978955079C151730666 @default.
- W1978955079 hasConceptScore W1978955079C162356407 @default.
- W1978955079 hasConceptScore W1978955079C171250308 @default.
- W1978955079 hasConceptScore W1978955079C178790620 @default.
- W1978955079 hasConceptScore W1978955079C184779094 @default.
- W1978955079 hasConceptScore W1978955079C185592680 @default.
- W1978955079 hasConceptScore W1978955079C187529661 @default.
- W1978955079 hasConceptScore W1978955079C188224857 @default.
- W1978955079 hasConceptScore W1978955079C192562407 @default.
- W1978955079 hasConceptScore W1978955079C193016168 @default.
- W1978955079 hasConceptScore W1978955079C2781463530 @default.
- W1978955079 hasConceptScore W1978955079C2816523 @default.
- W1978955079 hasConceptScore W1978955079C43617362 @default.
- W1978955079 hasConceptScore W1978955079C50774322 @default.
- W1978955079 hasConceptScore W1978955079C64297162 @default.
- W1978955079 hasConceptScore W1978955079C77671233 @default.
- W1978955079 hasConceptScore W1978955079C79176676 @default.
- W1978955079 hasConceptScore W1978955079C86803240 @default.
- W1978955079 hasConceptScore W1978955079C93106096 @default.
- W1978955079 hasIssue "1-2" @default.
- W1978955079 hasLocation W19789550791 @default.
- W1978955079 hasOpenAccess W1978955079 @default.
- W1978955079 hasPrimaryLocation W19789550791 @default.
- W1978955079 hasRelatedWork W1495609493 @default.
- W1978955079 hasRelatedWork W1978955079 @default.
- W1978955079 hasRelatedWork W1981127238 @default.
- W1978955079 hasRelatedWork W1983472299 @default.
- W1978955079 hasRelatedWork W2015795944 @default.
- W1978955079 hasRelatedWork W2030577121 @default.
- W1978955079 hasRelatedWork W2143633898 @default.
- W1978955079 hasRelatedWork W221669547 @default.
- W1978955079 hasRelatedWork W2387968294 @default.
- W1978955079 hasRelatedWork W2087927508 @default.
- W1978955079 hasVolume "108" @default.
- W1978955079 isParatext "false" @default.
- W1978955079 isRetracted "false" @default.
- W1978955079 magId "1978955079" @default.
- W1978955079 workType "article" @default.