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- W1978993591 abstract "The thermal accumulation improvement is based on laser epitaxial growth for monolithic 3D-ICs manufacturing. We propose one structure which has a thermal conduction layer such as Cu in ILD oxide layer. To reduce the Via depth and ILD oxide thickness can improve the re-crystallization quality for upper Si layer. With the conduction Cu layer, the Via depth can reduce to 200 nm, and the maximum temperature of the 1 <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>st</sup> layer poly gate and source/drain maintains as low as ~320 K and ~350 K, respectively, for laser re-crystallization annealing." @default.
- W1978993591 created "2016-06-24" @default.
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- W1978993591 date "2008-10-01" @default.
- W1978993591 modified "2023-09-23" @default.
- W1978993591 title "Thermal accumulation improvement for fabrication manufacturing of monolithic 3D integrated circuits" @default.
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- W1978993591 doi "https://doi.org/10.1109/icsict.2008.4734764" @default.
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