Matches in SemOpenAlex for { <https://semopenalex.org/work/W1979069783> ?p ?o ?g. }
Showing items 1 to 75 of
75
with 100 items per page.
- W1979069783 endingPage "715" @default.
- W1979069783 startingPage "712" @default.
- W1979069783 abstract "Experimental results on laser solid-phase doping of Si, GaAs and InP are presented. Using 1 kW CO2 laser, we fabricated ultra-shallow p–n junctions and Ohmic contacts with these semiconductors. The impurity distribution into the depth of the doped layers has been studied through the Auger electron spectroscopy (AES). The zero-bias resistance of formed GaAs p–n junctions was ∼1010 Ω and a typical resistance of nonrectifying contacts with GaAs and InP was 5·10−7 Ω·cm2 and 5·10−5 Ω·cm2, respectively." @default.
- W1979069783 created "2016-06-24" @default.
- W1979069783 creator A5002480778 @default.
- W1979069783 creator A5014537716 @default.
- W1979069783 creator A5028318964 @default.
- W1979069783 creator A5052861811 @default.
- W1979069783 creator A5075288547 @default.
- W1979069783 date "2000-02-01" @default.
- W1979069783 modified "2023-10-14" @default.
- W1979069783 title "Laser doping in Si, InP and GaAs" @default.
- W1979069783 cites W2028653382 @default.
- W1979069783 cites W2043716225 @default.
- W1979069783 cites W2067865436 @default.
- W1979069783 doi "https://doi.org/10.1016/s0169-4332(99)00470-5" @default.
- W1979069783 hasPublicationYear "2000" @default.
- W1979069783 type Work @default.
- W1979069783 sameAs 1979069783 @default.
- W1979069783 citedByCount "7" @default.
- W1979069783 countsByYear W19790697832016 @default.
- W1979069783 crossrefType "journal-article" @default.
- W1979069783 hasAuthorship W1979069783A5002480778 @default.
- W1979069783 hasAuthorship W1979069783A5014537716 @default.
- W1979069783 hasAuthorship W1979069783A5028318964 @default.
- W1979069783 hasAuthorship W1979069783A5052861811 @default.
- W1979069783 hasAuthorship W1979069783A5075288547 @default.
- W1979069783 hasConcept C108225325 @default.
- W1979069783 hasConcept C120665830 @default.
- W1979069783 hasConcept C121332964 @default.
- W1979069783 hasConcept C138230450 @default.
- W1979069783 hasConcept C171250308 @default.
- W1979069783 hasConcept C178790620 @default.
- W1979069783 hasConcept C185544564 @default.
- W1979069783 hasConcept C185592680 @default.
- W1979069783 hasConcept C192562407 @default.
- W1979069783 hasConcept C25442681 @default.
- W1979069783 hasConcept C2779227376 @default.
- W1979069783 hasConcept C49040817 @default.
- W1979069783 hasConcept C520434653 @default.
- W1979069783 hasConcept C57863236 @default.
- W1979069783 hasConcept C71987851 @default.
- W1979069783 hasConceptScore W1979069783C108225325 @default.
- W1979069783 hasConceptScore W1979069783C120665830 @default.
- W1979069783 hasConceptScore W1979069783C121332964 @default.
- W1979069783 hasConceptScore W1979069783C138230450 @default.
- W1979069783 hasConceptScore W1979069783C171250308 @default.
- W1979069783 hasConceptScore W1979069783C178790620 @default.
- W1979069783 hasConceptScore W1979069783C185544564 @default.
- W1979069783 hasConceptScore W1979069783C185592680 @default.
- W1979069783 hasConceptScore W1979069783C192562407 @default.
- W1979069783 hasConceptScore W1979069783C25442681 @default.
- W1979069783 hasConceptScore W1979069783C2779227376 @default.
- W1979069783 hasConceptScore W1979069783C49040817 @default.
- W1979069783 hasConceptScore W1979069783C520434653 @default.
- W1979069783 hasConceptScore W1979069783C57863236 @default.
- W1979069783 hasConceptScore W1979069783C71987851 @default.
- W1979069783 hasLocation W19790697831 @default.
- W1979069783 hasOpenAccess W1979069783 @default.
- W1979069783 hasPrimaryLocation W19790697831 @default.
- W1979069783 hasRelatedWork W103637215 @default.
- W1979069783 hasRelatedWork W1976761082 @default.
- W1979069783 hasRelatedWork W1987911600 @default.
- W1979069783 hasRelatedWork W1998185579 @default.
- W1979069783 hasRelatedWork W2054153071 @default.
- W1979069783 hasRelatedWork W2054877930 @default.
- W1979069783 hasRelatedWork W2056529065 @default.
- W1979069783 hasRelatedWork W2083754476 @default.
- W1979069783 hasRelatedWork W2088110792 @default.
- W1979069783 hasRelatedWork W2804275065 @default.
- W1979069783 hasVolume "154-155" @default.
- W1979069783 isParatext "false" @default.
- W1979069783 isRetracted "false" @default.
- W1979069783 magId "1979069783" @default.
- W1979069783 workType "article" @default.