Matches in SemOpenAlex for { <https://semopenalex.org/work/W1979104345> ?p ?o ?g. }
Showing items 1 to 70 of
70
with 100 items per page.
- W1979104345 endingPage "2935" @default.
- W1979104345 startingPage "2934" @default.
- W1979104345 abstract "High-quality TiN films were deposited in an electron cyclotron resonance (ECR) plasma process at low substrate temperatures between 100 and 450 °C using tetra-isopropoxide titanium (TIPT) {Ti[OCH(CH3)2]4} as precursor. TIPT was introduced into the downstream region of an ECR nitrogen or ammonia plasma. The electrical properties of the gold colored TiN layers (100–400 μΩ cm) depend on the deposition rate and the substrate temperature. Despite the use of an oxygen containing titanium precursor the oxygen content in the TiN was found to be ≤2 at.%. The measured resistivities and the purity of the TiN films indicate a selective cleavage of the isopropoxide ligand in the ECR downstream plasma. The films were characterized by resistivity measurements and secondary ion mass spectrometry." @default.
- W1979104345 created "2016-06-24" @default.
- W1979104345 creator A5049929982 @default.
- W1979104345 creator A5088054819 @default.
- W1979104345 creator A5090983593 @default.
- W1979104345 date "1995-11-13" @default.
- W1979104345 modified "2023-09-27" @default.
- W1979104345 title "Deposition of high-quality TiN using tetra-isopropoxide titanium in an electron cyclotron resonance plasma process" @default.
- W1979104345 doi "https://doi.org/10.1063/1.114847" @default.
- W1979104345 hasPublicationYear "1995" @default.
- W1979104345 type Work @default.
- W1979104345 sameAs 1979104345 @default.
- W1979104345 citedByCount "21" @default.
- W1979104345 countsByYear W19791043452012 @default.
- W1979104345 countsByYear W19791043452013 @default.
- W1979104345 crossrefType "journal-article" @default.
- W1979104345 hasAuthorship W1979104345A5049929982 @default.
- W1979104345 hasAuthorship W1979104345A5088054819 @default.
- W1979104345 hasAuthorship W1979104345A5090983593 @default.
- W1979104345 hasConcept C111368507 @default.
- W1979104345 hasConcept C113196181 @default.
- W1979104345 hasConcept C127313418 @default.
- W1979104345 hasConcept C145148216 @default.
- W1979104345 hasConcept C175361016 @default.
- W1979104345 hasConcept C178790620 @default.
- W1979104345 hasConcept C179104552 @default.
- W1979104345 hasConcept C185592680 @default.
- W1979104345 hasConcept C192562407 @default.
- W1979104345 hasConcept C194760766 @default.
- W1979104345 hasConcept C2777289219 @default.
- W1979104345 hasConcept C2778489163 @default.
- W1979104345 hasConcept C2779227376 @default.
- W1979104345 hasConcept C506065880 @default.
- W1979104345 hasConcept C525849907 @default.
- W1979104345 hasConceptScore W1979104345C111368507 @default.
- W1979104345 hasConceptScore W1979104345C113196181 @default.
- W1979104345 hasConceptScore W1979104345C127313418 @default.
- W1979104345 hasConceptScore W1979104345C145148216 @default.
- W1979104345 hasConceptScore W1979104345C175361016 @default.
- W1979104345 hasConceptScore W1979104345C178790620 @default.
- W1979104345 hasConceptScore W1979104345C179104552 @default.
- W1979104345 hasConceptScore W1979104345C185592680 @default.
- W1979104345 hasConceptScore W1979104345C192562407 @default.
- W1979104345 hasConceptScore W1979104345C194760766 @default.
- W1979104345 hasConceptScore W1979104345C2777289219 @default.
- W1979104345 hasConceptScore W1979104345C2778489163 @default.
- W1979104345 hasConceptScore W1979104345C2779227376 @default.
- W1979104345 hasConceptScore W1979104345C506065880 @default.
- W1979104345 hasConceptScore W1979104345C525849907 @default.
- W1979104345 hasIssue "20" @default.
- W1979104345 hasLocation W19791043451 @default.
- W1979104345 hasOpenAccess W1979104345 @default.
- W1979104345 hasPrimaryLocation W19791043451 @default.
- W1979104345 hasRelatedWork W1937723476 @default.
- W1979104345 hasRelatedWork W1979104345 @default.
- W1979104345 hasRelatedWork W2015685562 @default.
- W1979104345 hasRelatedWork W2026365251 @default.
- W1979104345 hasRelatedWork W2054137964 @default.
- W1979104345 hasRelatedWork W2070498667 @default.
- W1979104345 hasRelatedWork W2095862349 @default.
- W1979104345 hasRelatedWork W2316159514 @default.
- W1979104345 hasRelatedWork W2898506850 @default.
- W1979104345 hasRelatedWork W4316511175 @default.
- W1979104345 hasVolume "67" @default.
- W1979104345 isParatext "false" @default.
- W1979104345 isRetracted "false" @default.
- W1979104345 magId "1979104345" @default.
- W1979104345 workType "article" @default.