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- W1979152065 abstract "Indium tin oxide (ITO) thin film with SiO<sub>2</sub> protective upper layer prepared by electron beam evaporation was annealed in air up to 300°C. Evolution of transmittance, resistance and surface morphology of this SiO<sub>2</sub>/ITO coating was studied. Transmittance in visible and near-infrared range both increased while absorption edge exhibited red shift after annealing. Resistance increased monotonously with rising annealing temperature, yet increments became smaller at temperatures above 270°C. Micron-defects were observed on the surface of SiO<sub>2</sub>/ITO coating after annealing. Enhancement of crystallinity of ITO layer at high temperatures was thought to be responsible for these morphology and resistance evolutions." @default.
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- W1979152065 date "2010-10-11" @default.
- W1979152065 modified "2023-09-23" @default.
- W1979152065 title "Air-annealing effects on SiO 2 /ITO coating" @default.
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- W1979152065 doi "https://doi.org/10.1117/12.888408" @default.
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