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- W1979164315 abstract "Magnetic probe (B-dot) diagnostics of inductively coupled plasmas are reviewed in this lecture. The diagnostic fundamentals, the relationships between the measured B-dot signals and the rf electric fields and currents in an ICP, the design of B-dot experiment and the results of B-dot measurements carried out over a wide range of ICP parameters are discussed here. It is shown that commonly used B-dot probes enclosed in a dielectric shell significantly disturb the measured B-dot signals and may lead to erroneous results. Some new results on the electromagnetic field and rf current distribution measured in a cylindrical ICP with a flat inductor coil are discussed in terms of anomalous skin effect." @default.
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- W1979164315 date "1998-10-01" @default.
- W1979164315 modified "2023-09-26" @default.
- W1979164315 title "ICP diagnostics with magnetic probes" @default.
- W1979164315 doi "https://doi.org/10.1051/jp4:1998720" @default.
- W1979164315 hasPublicationYear "1998" @default.
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