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• W1979203467 abstract "Systematic error sources for the rotating-compensator ellipsometer are discussed. Starting from a general formalism, we derive explicit first-order expressions for the errors δΨ and δΔ caused by azimuthal errors and residual ellipticity introduced by imperfect polarizers or compensators and windows. Comparison is made with measurement results. It is shown that all azimuthal-angle errors can be eliminated by a two-zone measurement and that the natural optical rotation of the rotating quartz compensator has no effect on the measurements." @default.
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• W1979203467 date "1994-09-01" @default.
• W1979203467 modified "2023-09-23" @default.
• W1979203467 title "Systematic errors in rotating-compensator ellipsometry" @default.
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• W1979203467 doi "https://doi.org/10.1364/josaa.11.002550" @default.
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