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- W1979238003 abstract "Multiple energy Be+ ion implantation has been used to produce p-type regions in n-In0.53Ga0.47As (n≃1016 cm−3). A simple technique has been developed for capless annealing of InGaAs up to 700 °C. The activation efficiency of the implanted Be+ is dependent on the implant energy and dosage with a maximum activation of 40% for 50-keV implants. When the total implant dose exceeds 1014 cm−2, substantial diffusion of Be occurs resulting in a p+-n−-n structure. Planar diodes formed by Be+ implantation have a reverse breakdown voltage of 50 V and an ideality factor of 1.5 in the forward direction." @default.
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- W1979238003 date "1982-03-15" @default.
- W1979238003 modified "2023-10-16" @default.
- W1979238003 title "Ion implantation of Be in In0.53Ga0.47As" @default.
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- W1979238003 doi "https://doi.org/10.1063/1.93163" @default.
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