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- W1979338473 endingPage "3371" @default.
- W1979338473 startingPage "3368" @default.
- W1979338473 abstract "An amorphous tungsten nitride film with a 10–40 at.% nitrogen concentration was produced by reactive sputtering. The amorphous W67N33 film could be fully crystallized into a pure α-tungsten phase with equaixed grains, which had a similar resistivity to that of the sputtered pure tungsten film, by rapid thermal annealing (RTA) for 60 s at 1273 K. It was also found that the nitrogen content in the tungsten nitride films decreased significantly. This decomposition of tungsten nitride at least restrained the formation of interface reaction products such as tungsten silicide without an additional diffusion barrier layer. The RTA process of the amorphous tungsten nitrides showed the possibility of the formation of the low-resistivity pure tungsten film without a diffusion barrier." @default.
- W1979338473 created "2016-06-24" @default.
- W1979338473 creator A5067627181 @default.
- W1979338473 date "2003-06-15" @default.
- W1979338473 modified "2023-10-14" @default.
- W1979338473 title "Crystallization of Reactively Sputtered Amorphous Tungsten Nitride Film" @default.
- W1979338473 cites W1986159791 @default.
- W1979338473 cites W2003453432 @default.
- W1979338473 cites W2004599534 @default.
- W1979338473 cites W2084469462 @default.
- W1979338473 cites W2153861370 @default.
- W1979338473 cites W2157527561 @default.
- W1979338473 cites W2174924140 @default.
- W1979338473 doi "https://doi.org/10.1143/jjap.42.3368" @default.
- W1979338473 hasPublicationYear "2003" @default.
- W1979338473 type Work @default.
- W1979338473 sameAs 1979338473 @default.
- W1979338473 citedByCount "5" @default.
- W1979338473 countsByYear W19793384732015 @default.
- W1979338473 countsByYear W19793384732019 @default.
- W1979338473 crossrefType "journal-article" @default.
- W1979338473 hasAuthorship W1979338473A5067627181 @default.
- W1979338473 hasBestOaLocation W19793384731 @default.
- W1979338473 hasConcept C119599485 @default.
- W1979338473 hasConcept C127413603 @default.
- W1979338473 hasConcept C159985019 @default.
- W1979338473 hasConcept C171250308 @default.
- W1979338473 hasConcept C185592680 @default.
- W1979338473 hasConcept C19067145 @default.
- W1979338473 hasConcept C191897082 @default.
- W1979338473 hasConcept C192562407 @default.
- W1979338473 hasConcept C194760766 @default.
- W1979338473 hasConcept C203036418 @default.
- W1979338473 hasConcept C22423302 @default.
- W1979338473 hasConcept C2777855556 @default.
- W1979338473 hasConcept C2778836790 @default.
- W1979338473 hasConcept C2779227376 @default.
- W1979338473 hasConcept C2780901251 @default.
- W1979338473 hasConcept C42360764 @default.
- W1979338473 hasConcept C542268612 @default.
- W1979338473 hasConcept C544956773 @default.
- W1979338473 hasConcept C56052488 @default.
- W1979338473 hasConcept C69990965 @default.
- W1979338473 hasConcept C8010536 @default.
- W1979338473 hasConceptScore W1979338473C119599485 @default.
- W1979338473 hasConceptScore W1979338473C127413603 @default.
- W1979338473 hasConceptScore W1979338473C159985019 @default.
- W1979338473 hasConceptScore W1979338473C171250308 @default.
- W1979338473 hasConceptScore W1979338473C185592680 @default.
- W1979338473 hasConceptScore W1979338473C19067145 @default.
- W1979338473 hasConceptScore W1979338473C191897082 @default.
- W1979338473 hasConceptScore W1979338473C192562407 @default.
- W1979338473 hasConceptScore W1979338473C194760766 @default.
- W1979338473 hasConceptScore W1979338473C203036418 @default.
- W1979338473 hasConceptScore W1979338473C22423302 @default.
- W1979338473 hasConceptScore W1979338473C2777855556 @default.
- W1979338473 hasConceptScore W1979338473C2778836790 @default.
- W1979338473 hasConceptScore W1979338473C2779227376 @default.
- W1979338473 hasConceptScore W1979338473C2780901251 @default.
- W1979338473 hasConceptScore W1979338473C42360764 @default.
- W1979338473 hasConceptScore W1979338473C542268612 @default.
- W1979338473 hasConceptScore W1979338473C544956773 @default.
- W1979338473 hasConceptScore W1979338473C56052488 @default.
- W1979338473 hasConceptScore W1979338473C69990965 @default.
- W1979338473 hasConceptScore W1979338473C8010536 @default.
- W1979338473 hasIssue "Part 1, No. 6A" @default.
- W1979338473 hasLocation W19793384731 @default.
- W1979338473 hasOpenAccess W1979338473 @default.
- W1979338473 hasPrimaryLocation W19793384731 @default.
- W1979338473 hasRelatedWork W1520631599 @default.
- W1979338473 hasRelatedWork W1979338473 @default.
- W1979338473 hasRelatedWork W1986482499 @default.
- W1979338473 hasRelatedWork W1998973667 @default.
- W1979338473 hasRelatedWork W2056934220 @default.
- W1979338473 hasRelatedWork W2111714040 @default.
- W1979338473 hasRelatedWork W2149008269 @default.
- W1979338473 hasRelatedWork W3183194155 @default.
- W1979338473 hasRelatedWork W357584986 @default.
- W1979338473 hasRelatedWork W2151465058 @default.
- W1979338473 hasVolume "42" @default.
- W1979338473 isParatext "false" @default.
- W1979338473 isRetracted "false" @default.
- W1979338473 magId "1979338473" @default.
- W1979338473 workType "article" @default.