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- W1979417246 abstract "An investigation was made of solid-phase damage to the surface of silicon by Nd:YAG laser pulses. The results made it possible to postulate particle emission when the surface of silicon was subjected to laser pulses with the threshold power density Imelt corresponding to the onset of surface melting. Such emission was attributed to the formation of surface microcracks as a result of condensation of nonequilibrium defects under the action of elastic stresses." @default.
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- W1979417246 date "1998-10-31" @default.
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- W1979417246 title "Damage to the surface of silicon in the solid phase by the action of Nd:YAG laser pulses" @default.
- W1979417246 doi "https://doi.org/10.1070/qe1998v028n10abeh001355" @default.
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