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- W1979556075 abstract "This paper proposes a ramp dual-pulse actuation-voltage waveform that reduces actuation-voltage shift in capacitive microelectromechanical system (MEMS) switches. The proposed waveform as well as two reported waveforms (dual pulse, and novel dual-pulse) are analyzed using equivalent-circuit and equation models. Based on the analysis outcome, the paper provides a clear understanding of trapped charge density in the dielectric. The results show that the proposed actuation-voltage waveform successfully reduces trapped charge and increases lifetime due to lowering of actuation-voltage shift. Using the proposed actuation-voltage waveform, the membrane reaches a steady state on the electrode faster." @default.
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- W1979556075 date "2012-01-01" @default.
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- W1979556075 title "Low actuation-voltage shift in MEMS switch using ramp dual-pulse" @default.
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- W1979556075 doi "https://doi.org/10.1587/elex.9.1062" @default.
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