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• W1979570879 endingPage "821" @default.
• W1979570879 startingPage "818" @default.
• W1979570879 abstract "Plasma immersion ion deposition (PIID) has been used to synthesize hard amorphous hydrogenated carbon or diamondlike carbon (DLC) thin films on Si substrates with rf inductive plasmas of various Ar and C2H2 gas mixtures. The surface hardness and stress of the films were highly dependent on the magnitude of the total rf power and the pulse-bias duty factor. The ratios of the ion flux and the film deposition flux, Ji/Jd, were estimated and correlated with DLC film stress, hardness, and the amount of argon and hydrogen content retained. The DLC properties (hardness and film stress) were maximal when the Ji/Jd value ranged between 0.6 and 0.8. The balance between ion-energy transfer and relaxation in the surface and subsurface carbon atoms may explain the DLC growth in this work. The role of ion-current flux in the PIID process was found to be as important as it is in conventional ion beam assisted deposition processing." @default.
• W1979570879 created "2016-06-24" @default.
• W1979570879 creator A5022768779 @default.
• W1979570879 creator A5033015466 @default.
• W1979570879 creator A5054515091 @default.
• W1979570879 date "1999-03-01" @default.
• W1979570879 modified "2023-09-26" @default.
• W1979570879 title "Processing of diamondlike carbon using plasma immersion ion deposition" @default.
• W1979570879 cites W1971260593 @default.
• W1979570879 cites W2004405314 @default.
• W1979570879 cites W2029872799 @default.
• W1979570879 cites W2035945299 @default.
• W1979570879 cites W2040095201 @default.
• W1979570879 cites W2043501206 @default.
• W1979570879 cites W2050489803 @default.
• W1979570879 cites W2066874036 @default.
• W1979570879 cites W2083855830 @default.
• W1979570879 cites W2109468230 @default.
• W1979570879 doi "https://doi.org/10.1116/1.590645" @default.
• W1979570879 hasPublicationYear "1999" @default.
• W1979570879 type Work @default.
• W1979570879 sameAs 1979570879 @default.
• W1979570879 citedByCount "14" @default.
• W1979570879 countsByYear W19795708792012 @default.
• W1979570879 countsByYear W19795708792013 @default.
• W1979570879 crossrefType "journal-article" @default.
• W1979570879 hasAuthorship W1979570879A5022768779 @default.
• W1979570879 hasAuthorship W1979570879A5033015466 @default.
• W1979570879 hasAuthorship W1979570879A5054515091 @default.
• W1979570879 hasConcept C104779481 @default.
• W1979570879 hasConcept C113196181 @default.
• W1979570879 hasConcept C121332964 @default.
• W1979570879 hasConcept C123380192 @default.
• W1979570879 hasConcept C140205800 @default.
• W1979570879 hasConcept C145148216 @default.
• W1979570879 hasConcept C151730666 @default.
• W1979570879 hasConcept C159985019 @default.
• W1979570879 hasConcept C171250308 @default.
• W1979570879 hasConcept C178790620 @default.
• W1979570879 hasConcept C185592680 @default.
• W1979570879 hasConcept C19067145 @default.
• W1979570879 hasConcept C192562407 @default.
• W1979570879 hasConcept C201931942 @default.
• W1979570879 hasConcept C2778702798 @default.
• W1979570879 hasConcept C2781463530 @default.
• W1979570879 hasConcept C2816523 @default.
• W1979570879 hasConcept C41823505 @default.
• W1979570879 hasConcept C43617362 @default.
• W1979570879 hasConcept C50774322 @default.
• W1979570879 hasConcept C547737533 @default.
• W1979570879 hasConcept C56052488 @default.
• W1979570879 hasConcept C62520636 @default.
• W1979570879 hasConcept C64297162 @default.
• W1979570879 hasConcept C75937256 @default.
• W1979570879 hasConcept C8010536 @default.
• W1979570879 hasConcept C82706917 @default.
• W1979570879 hasConcept C86803240 @default.
• W1979570879 hasConcept C93106096 @default.
• W1979570879 hasConceptScore W1979570879C104779481 @default.
• W1979570879 hasConceptScore W1979570879C113196181 @default.
• W1979570879 hasConceptScore W1979570879C121332964 @default.
• W1979570879 hasConceptScore W1979570879C123380192 @default.
• W1979570879 hasConceptScore W1979570879C140205800 @default.
• W1979570879 hasConceptScore W1979570879C145148216 @default.
• W1979570879 hasConceptScore W1979570879C151730666 @default.
• W1979570879 hasConceptScore W1979570879C159985019 @default.
• W1979570879 hasConceptScore W1979570879C171250308 @default.
• W1979570879 hasConceptScore W1979570879C178790620 @default.
• W1979570879 hasConceptScore W1979570879C185592680 @default.
• W1979570879 hasConceptScore W1979570879C19067145 @default.
• W1979570879 hasConceptScore W1979570879C192562407 @default.
• W1979570879 hasConceptScore W1979570879C201931942 @default.
• W1979570879 hasConceptScore W1979570879C2778702798 @default.
• W1979570879 hasConceptScore W1979570879C2781463530 @default.
• W1979570879 hasConceptScore W1979570879C2816523 @default.
• W1979570879 hasConceptScore W1979570879C41823505 @default.
• W1979570879 hasConceptScore W1979570879C43617362 @default.
• W1979570879 hasConceptScore W1979570879C50774322 @default.
• W1979570879 hasConceptScore W1979570879C547737533 @default.
• W1979570879 hasConceptScore W1979570879C56052488 @default.
• W1979570879 hasConceptScore W1979570879C62520636 @default.
• W1979570879 hasConceptScore W1979570879C64297162 @default.
• W1979570879 hasConceptScore W1979570879C75937256 @default.
• W1979570879 hasConceptScore W1979570879C8010536 @default.
• W1979570879 hasConceptScore W1979570879C82706917 @default.
• W1979570879 hasConceptScore W1979570879C86803240 @default.
• W1979570879 hasConceptScore W1979570879C93106096 @default.
• W1979570879 hasIssue "2" @default.
• W1979570879 hasLocation W19795708791 @default.
• W1979570879 hasOpenAccess W1979570879 @default.
• W1979570879 hasPrimaryLocation W19795708791 @default.
• W1979570879 hasRelatedWork W136446251 @default.
• W1979570879 hasRelatedWork W1979570879 @default.
• W1979570879 hasRelatedWork W1989615535 @default.
• W1979570879 hasRelatedWork W1990786405 @default.
• W1979570879 hasRelatedWork W2007148381 @default.
• W1979570879 hasRelatedWork W2058104935 @default.
• W1979570879 hasRelatedWork W2064291405 @default.

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