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• W1979832533 endingPage "184" @default.
• W1979832533 startingPage "181" @default.
• W1979832533 abstract "Phosphorus-doped hydrogenated nanocrystalline silicon films (nc-Si(P):H) were prepared by electron cyclotron resonance plasma-enhanced chemical vapor deposition. The effect of Ar/H2 ratio on the characteristics of as-grown nc-Si(P):H films was investigated systematically with Raman scattering, Hall effect measurements as well as Fourier Transform infrared spectroscopy (FTIR). The results indicated that the Ar/H2 ratio played a critical role for the crystalline quality and electrical properties of the nc-Si:H films. FTIR also showed that infrared spectrum intensity of SiH2 bonding mode peak decreased when Ar/H2 ratio increased. The optimal value Ar/H2 ratio of 10/15 was obtained for high quality nc-Si(P):H films with high electron density and the mechanism was elucidated in terms of Raman and FTIR analysis." @default.
• W1979832533 created "2016-06-24" @default.
• W1979832533 creator A5008652602 @default.
• W1979832533 creator A5009863035 @default.
• W1979832533 creator A5039785455 @default.
• W1979832533 creator A5082196739 @default.
• W1979832533 creator A5084929535 @default.
• W1979832533 date "2012-10-01" @default.
• W1979832533 modified "2023-09-26" @default.
• W1979832533 title "Influence of Ar/H2 ratio on the characteristics of phosphorus-doped hydrogenated nanocrystalline silicon films prepared by electron cyclotron resonance plasma-enhanced chemical vapor deposition" @default.
• W1979832533 cites W1006352040 @default.
• W1979832533 cites W1560594519 @default.
• W1979832533 cites W1964187611 @default.
• W1979832533 cites W1970123511 @default.
• W1979832533 cites W1983454064 @default.
• W1979832533 cites W1989331028 @default.
• W1979832533 cites W1989498834 @default.
• W1979832533 cites W2013996497 @default.
• W1979832533 cites W2014216588 @default.
• W1979832533 cites W2029352926 @default.
• W1979832533 cites W2034903605 @default.
• W1979832533 cites W2040100028 @default.
• W1979832533 cites W2053862605 @default.
• W1979832533 cites W2068528618 @default.
• W1979832533 cites W2073958354 @default.
• W1979832533 cites W2078082086 @default.
• W1979832533 cites W2088988571 @default.
• W1979832533 cites W2090197610 @default.
• W1979832533 cites W2095104450 @default.
• W1979832533 cites W2140302299 @default.
• W1979832533 cites W2581298863 @default.
• W1979832533 doi "https://doi.org/10.1016/j.tsf.2011.12.038" @default.
• W1979832533 hasPublicationYear "2012" @default.
• W1979832533 type Work @default.
• W1979832533 sameAs 1979832533 @default.
• W1979832533 citedByCount "1" @default.
• W1979832533 countsByYear W19798325332015 @default.
• W1979832533 crossrefType "journal-article" @default.
• W1979832533 hasAuthorship W1979832533A5008652602 @default.
• W1979832533 hasAuthorship W1979832533A5009863035 @default.
• W1979832533 hasAuthorship W1979832533A5039785455 @default.
• W1979832533 hasAuthorship W1979832533A5082196739 @default.
• W1979832533 hasAuthorship W1979832533A5084929535 @default.
• W1979832533 hasConcept C113196181 @default.
• W1979832533 hasConcept C120665830 @default.
• W1979832533 hasConcept C121332964 @default.
• W1979832533 hasConcept C127413603 @default.
• W1979832533 hasConcept C140676511 @default.
• W1979832533 hasConcept C145148216 @default.
• W1979832533 hasConcept C158355884 @default.
• W1979832533 hasConcept C160892712 @default.
• W1979832533 hasConcept C171250308 @default.
• W1979832533 hasConcept C175361016 @default.
• W1979832533 hasConcept C178790620 @default.
• W1979832533 hasConcept C185592680 @default.
• W1979832533 hasConcept C192562407 @default.
• W1979832533 hasConcept C38347018 @default.
• W1979832533 hasConcept C40003534 @default.
• W1979832533 hasConcept C42360764 @default.
• W1979832533 hasConcept C43617362 @default.
• W1979832533 hasConcept C49040817 @default.
• W1979832533 hasConcept C544956773 @default.
• W1979832533 hasConcept C57410435 @default.
• W1979832533 hasConcept C57863236 @default.
• W1979832533 hasConcept C8010536 @default.
• W1979832533 hasConceptScore W1979832533C113196181 @default.
• W1979832533 hasConceptScore W1979832533C120665830 @default.
• W1979832533 hasConceptScore W1979832533C121332964 @default.
• W1979832533 hasConceptScore W1979832533C127413603 @default.
• W1979832533 hasConceptScore W1979832533C140676511 @default.
• W1979832533 hasConceptScore W1979832533C145148216 @default.
• W1979832533 hasConceptScore W1979832533C158355884 @default.
• W1979832533 hasConceptScore W1979832533C160892712 @default.
• W1979832533 hasConceptScore W1979832533C171250308 @default.
• W1979832533 hasConceptScore W1979832533C175361016 @default.
• W1979832533 hasConceptScore W1979832533C178790620 @default.
• W1979832533 hasConceptScore W1979832533C185592680 @default.
• W1979832533 hasConceptScore W1979832533C192562407 @default.
• W1979832533 hasConceptScore W1979832533C38347018 @default.
• W1979832533 hasConceptScore W1979832533C40003534 @default.
• W1979832533 hasConceptScore W1979832533C42360764 @default.
• W1979832533 hasConceptScore W1979832533C43617362 @default.
• W1979832533 hasConceptScore W1979832533C49040817 @default.
• W1979832533 hasConceptScore W1979832533C544956773 @default.
• W1979832533 hasConceptScore W1979832533C57410435 @default.
• W1979832533 hasConceptScore W1979832533C57863236 @default.
• W1979832533 hasConceptScore W1979832533C8010536 @default.
• W1979832533 hasLocation W19798325331 @default.
• W1979832533 hasOpenAccess W1979832533 @default.
• W1979832533 hasPrimaryLocation W19798325331 @default.
• W1979832533 hasRelatedWork W1979832533 @default.
• W1979832533 hasRelatedWork W2033687618 @default.
• W1979832533 hasRelatedWork W2052184109 @default.
• W1979832533 hasRelatedWork W2067098246 @default.
• W1979832533 hasRelatedWork W2087328166 @default.
• W1979832533 hasRelatedWork W2134817527 @default.
• W1979832533 hasRelatedWork W2140202692 @default.
• W1979832533 hasRelatedWork W2378544789 @default.

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