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- W1980097788 abstract "The hollow cathode cylindrical magnetron is demonstrated to be capable of depositing uniform coatings on heavy metal fluoride fibers while maintaining the fiber temperature below 150°C. Pure metal coatings were deposited at typically 3000 Å/min, while oxynitride coatings were deposited at roughly 300 Å/min. We also demonstrated the hermeticity of AlN coatings for periods of several hundred hours even when immersed in water." @default.
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- W1980097788 date "1992-12-01" @default.
- W1980097788 modified "2023-10-14" @default.
- W1980097788 title "Hermetic Coatings on Fluoride Glass Fibers Using Cylindrical Magnetron Reactive Sputtering" @default.
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- W1980097788 doi "https://doi.org/10.1143/jjap.31.3969" @default.
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