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- W1980281376 endingPage "2407" @default.
- W1980281376 startingPage "2401" @default.
- W1980281376 abstract "To improve the transparency, flexibility, and solubility of polyimide, and to fabricate a negative working photoresist, polyamic acid, polyurea, and poly(amic acid-co-urea) in various contents were synthesized. Photosensitive diazoresin was synthesized and was used as the photocrosslinking agent. Characteristics of the polymers were identified by using IR, EA, DSC, TGA, and UV. From dissolution capabilities and thermal properties of the polymers, we chose the most suitable polymer PA25 as the main resin of the negative photoresist. The mixture of the polymer and diazo resin can be used as a negative photoresist. Optical characteristics of the polymer and diazo resin were evaluated by UV spectrophotometer. It was found that the polymer and diazo resin showed different absorption wavelengths under UV exposure. Characteristics of the negative photoresist were investigated by using i-line lithography. A contact printing exposure technique was used in this investigation. Dissolution rate and resolution capability of the photoresist containing various amounts of diazo resin were evaluated. The optimal prebaking time, postbaking time, and SEM patterns of the negative photoresist were also investigated. © 1998 John Wiley & Sons, Inc. J Appl Polym Sci 70: 2401–2407, 1998" @default.
- W1980281376 created "2016-06-24" @default.
- W1980281376 creator A5035280593 @default.
- W1980281376 creator A5052042577 @default.
- W1980281376 creator A5080863817 @default.
- W1980281376 date "1998-12-19" @default.
- W1980281376 modified "2023-09-24" @default.
- W1980281376 title "Syntheses and characterization of photocrosslinkable poly(amic acid-co-urea)s with diazoresin" @default.
- W1980281376 doi "https://doi.org/10.1002/(sici)1097-4628(19981219)70:12<2401::aid-app12>3.0.co;2-b" @default.
- W1980281376 hasPublicationYear "1998" @default.
- W1980281376 type Work @default.
- W1980281376 sameAs 1980281376 @default.
- W1980281376 citedByCount "6" @default.
- W1980281376 countsByYear W19802813762012 @default.
- W1980281376 countsByYear W19802813762013 @default.
- W1980281376 crossrefType "journal-article" @default.
- W1980281376 hasAuthorship W1980281376A5035280593 @default.
- W1980281376 hasAuthorship W1980281376A5052042577 @default.
- W1980281376 hasAuthorship W1980281376A5080863817 @default.
- W1980281376 hasConcept C105487726 @default.
- W1980281376 hasConcept C127413603 @default.
- W1980281376 hasConcept C134406635 @default.
- W1980281376 hasConcept C159985019 @default.
- W1980281376 hasConcept C171250308 @default.
- W1980281376 hasConcept C178790620 @default.
- W1980281376 hasConcept C185592680 @default.
- W1980281376 hasConcept C188027245 @default.
- W1980281376 hasConcept C192562407 @default.
- W1980281376 hasConcept C2776904781 @default.
- W1980281376 hasConcept C2778093655 @default.
- W1980281376 hasConcept C2779227376 @default.
- W1980281376 hasConcept C2780965675 @default.
- W1980281376 hasConcept C42360764 @default.
- W1980281376 hasConcept C521977710 @default.
- W1980281376 hasConcept C88380143 @default.
- W1980281376 hasConceptScore W1980281376C105487726 @default.
- W1980281376 hasConceptScore W1980281376C127413603 @default.
- W1980281376 hasConceptScore W1980281376C134406635 @default.
- W1980281376 hasConceptScore W1980281376C159985019 @default.
- W1980281376 hasConceptScore W1980281376C171250308 @default.
- W1980281376 hasConceptScore W1980281376C178790620 @default.
- W1980281376 hasConceptScore W1980281376C185592680 @default.
- W1980281376 hasConceptScore W1980281376C188027245 @default.
- W1980281376 hasConceptScore W1980281376C192562407 @default.
- W1980281376 hasConceptScore W1980281376C2776904781 @default.
- W1980281376 hasConceptScore W1980281376C2778093655 @default.
- W1980281376 hasConceptScore W1980281376C2779227376 @default.
- W1980281376 hasConceptScore W1980281376C2780965675 @default.
- W1980281376 hasConceptScore W1980281376C42360764 @default.
- W1980281376 hasConceptScore W1980281376C521977710 @default.
- W1980281376 hasConceptScore W1980281376C88380143 @default.
- W1980281376 hasIssue "12" @default.
- W1980281376 hasLocation W19802813761 @default.
- W1980281376 hasOpenAccess W1980281376 @default.
- W1980281376 hasPrimaryLocation W19802813761 @default.
- W1980281376 hasRelatedWork W1577782092 @default.
- W1980281376 hasRelatedWork W1980281376 @default.
- W1980281376 hasRelatedWork W1990242717 @default.
- W1980281376 hasRelatedWork W1990817171 @default.
- W1980281376 hasRelatedWork W2031410776 @default.
- W1980281376 hasRelatedWork W2086831025 @default.
- W1980281376 hasRelatedWork W2102814320 @default.
- W1980281376 hasRelatedWork W2104071393 @default.
- W1980281376 hasRelatedWork W2162243237 @default.
- W1980281376 hasRelatedWork W2354258528 @default.
- W1980281376 hasVolume "70" @default.
- W1980281376 isParatext "false" @default.
- W1980281376 isRetracted "false" @default.
- W1980281376 magId "1980281376" @default.
- W1980281376 workType "article" @default.