Matches in SemOpenAlex for { <https://semopenalex.org/work/W1980302541> ?p ?o ?g. }
Showing items 1 to 98 of
98
with 100 items per page.
- W1980302541 endingPage "465" @default.
- W1980302541 startingPage "463" @default.
- W1980302541 abstract "The gettering mechanism due to misfit dislocations in P/P+ epitaxial wafers is clarified for copper-diffused epitaxial wafers. The epilayer thickness of the sample is 2.2 μm and the substrate resistivity of the sample is 0.0015–0.002 Ω cm. It is dipped in a Cu(NO3 )2 -HF solution and annealed at 900 °C for 30 min. The in-depth Cu profile obtained by secondary-ion mass spectroscopy shows a distinctive peak at the P+ -substrate side in the vicinity of the epi/sub interface. This peak coincides with that of dislocation density for their location in depth. Furthermore, from energy dispersive spectroscopy observation the diffused copper is found to be effectively gettered at misfit dislocations as copper silicide from moiré fringe." @default.
- W1980302541 created "2016-06-24" @default.
- W1980302541 creator A5001308058 @default.
- W1980302541 creator A5064120942 @default.
- W1980302541 creator A5077807337 @default.
- W1980302541 creator A5085720046 @default.
- W1980302541 date "1989-01-30" @default.
- W1980302541 modified "2023-10-02" @default.
- W1980302541 title "New gettering using misfit dislocations in homoepitaxial wafers with heavily boron-doped silicon substrates" @default.
- W1980302541 cites W1900220030 @default.
- W1980302541 cites W1983975636 @default.
- W1980302541 cites W2006616314 @default.
- W1980302541 cites W2007472085 @default.
- W1980302541 cites W2009347908 @default.
- W1980302541 cites W2146811244 @default.
- W1980302541 doi "https://doi.org/10.1063/1.100953" @default.
- W1980302541 hasPublicationYear "1989" @default.
- W1980302541 type Work @default.
- W1980302541 sameAs 1980302541 @default.
- W1980302541 citedByCount "14" @default.
- W1980302541 crossrefType "journal-article" @default.
- W1980302541 hasAuthorship W1980302541A5001308058 @default.
- W1980302541 hasAuthorship W1980302541A5064120942 @default.
- W1980302541 hasAuthorship W1980302541A5077807337 @default.
- W1980302541 hasAuthorship W1980302541A5085720046 @default.
- W1980302541 hasConcept C110738630 @default.
- W1980302541 hasConcept C111368507 @default.
- W1980302541 hasConcept C113196181 @default.
- W1980302541 hasConcept C119599485 @default.
- W1980302541 hasConcept C125099081 @default.
- W1980302541 hasConcept C127313418 @default.
- W1980302541 hasConcept C127413603 @default.
- W1980302541 hasConcept C159122135 @default.
- W1980302541 hasConcept C159985019 @default.
- W1980302541 hasConcept C160671074 @default.
- W1980302541 hasConcept C178790620 @default.
- W1980302541 hasConcept C185592680 @default.
- W1980302541 hasConcept C191897082 @default.
- W1980302541 hasConcept C192562407 @default.
- W1980302541 hasConcept C2777289219 @default.
- W1980302541 hasConcept C2779227376 @default.
- W1980302541 hasConcept C2780901251 @default.
- W1980302541 hasConcept C43617362 @default.
- W1980302541 hasConcept C49040817 @default.
- W1980302541 hasConcept C501308230 @default.
- W1980302541 hasConcept C544778455 @default.
- W1980302541 hasConcept C544956773 @default.
- W1980302541 hasConcept C57863236 @default.
- W1980302541 hasConcept C69990965 @default.
- W1980302541 hasConcept C71987851 @default.
- W1980302541 hasConcept C8010536 @default.
- W1980302541 hasConceptScore W1980302541C110738630 @default.
- W1980302541 hasConceptScore W1980302541C111368507 @default.
- W1980302541 hasConceptScore W1980302541C113196181 @default.
- W1980302541 hasConceptScore W1980302541C119599485 @default.
- W1980302541 hasConceptScore W1980302541C125099081 @default.
- W1980302541 hasConceptScore W1980302541C127313418 @default.
- W1980302541 hasConceptScore W1980302541C127413603 @default.
- W1980302541 hasConceptScore W1980302541C159122135 @default.
- W1980302541 hasConceptScore W1980302541C159985019 @default.
- W1980302541 hasConceptScore W1980302541C160671074 @default.
- W1980302541 hasConceptScore W1980302541C178790620 @default.
- W1980302541 hasConceptScore W1980302541C185592680 @default.
- W1980302541 hasConceptScore W1980302541C191897082 @default.
- W1980302541 hasConceptScore W1980302541C192562407 @default.
- W1980302541 hasConceptScore W1980302541C2777289219 @default.
- W1980302541 hasConceptScore W1980302541C2779227376 @default.
- W1980302541 hasConceptScore W1980302541C2780901251 @default.
- W1980302541 hasConceptScore W1980302541C43617362 @default.
- W1980302541 hasConceptScore W1980302541C49040817 @default.
- W1980302541 hasConceptScore W1980302541C501308230 @default.
- W1980302541 hasConceptScore W1980302541C544778455 @default.
- W1980302541 hasConceptScore W1980302541C544956773 @default.
- W1980302541 hasConceptScore W1980302541C57863236 @default.
- W1980302541 hasConceptScore W1980302541C69990965 @default.
- W1980302541 hasConceptScore W1980302541C71987851 @default.
- W1980302541 hasConceptScore W1980302541C8010536 @default.
- W1980302541 hasIssue "5" @default.
- W1980302541 hasLocation W19803025411 @default.
- W1980302541 hasOpenAccess W1980302541 @default.
- W1980302541 hasPrimaryLocation W19803025411 @default.
- W1980302541 hasRelatedWork W1831207088 @default.
- W1980302541 hasRelatedWork W2000484147 @default.
- W1980302541 hasRelatedWork W2007522409 @default.
- W1980302541 hasRelatedWork W2008399498 @default.
- W1980302541 hasRelatedWork W2016799154 @default.
- W1980302541 hasRelatedWork W2031003934 @default.
- W1980302541 hasRelatedWork W2066737639 @default.
- W1980302541 hasRelatedWork W2131433107 @default.
- W1980302541 hasRelatedWork W2531948254 @default.
- W1980302541 hasRelatedWork W4226067300 @default.
- W1980302541 hasVolume "54" @default.
- W1980302541 isParatext "false" @default.
- W1980302541 isRetracted "false" @default.
- W1980302541 magId "1980302541" @default.
- W1980302541 workType "article" @default.