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Matches in SemOpenAlex for { <https://semopenalex.org/work/W1980401789> ?p ?o ?g. }

• W1980401789 abstract "Abstract The hydrogen depth profiles in a−Si:H/a−Si1−xCx: H(B) films prepared by rf glow discharge at substrate temperatures Ts = 150, 200, 250 and 300°C were determined by elastic recoil detection. The depth distribution shapes of hydrogen concentration in these films and some of the characteristics are presented." @default.
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• W1980401789 date "1993-11-01" @default.
• W1980401789 modified "2023-09-26" @default.
• W1980401789 title "Study on the hydrogen depth profiles in amorphous silicon films by elastic recoil detection" @default.
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• W1980401789 doi "https://doi.org/10.1016/0042-207x(93)90346-c" @default.
• W1980401789 hasPublicationYear "1993" @default.
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