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- W1980550735 abstract "We report the single-step fabrication technique using the hybrid sol-gel material with high-energy beam sensitive (HEBS) grey scale mask for low-cost mass production of continuous surface relief micro-optical components." @default.
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- W1980550735 date "2002-01-01" @default.
- W1980550735 modified "2023-09-24" @default.
- W1980550735 title "Single step fabrication of blazed grating on sol-gel glass with high-energy beam-sensitive grey scale mask" @default.
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- W1980550735 doi "https://doi.org/10.1364/domo.2002.dmb4" @default.
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