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- W1980587513 abstract "Measurements of particles in liquid are important application for biosensor, process monitoring, and so on. In this paper, we present experimental consideration of particle measurements using a shear horizontal surface acoustic wave (SH-SAW) sensor. The SH-SAW sensor was fabricated on a 36YX-LiTaO3 single crystal. The SH-SAW is influenced by mechanical and electrical perturbations of the adjacent medium on the propagating surface [1]. A three-channel SH-SAW sensor was proposed [2] for simultaneous detection of the perturbations (Fig. 1). The mechanical perturbation of the SH-SAW was obtained from the differential signals between ch. 1 and ch. 2, while the electrical perturbation was obtained from the differential signals between ch. 2 and ch. 3. In the measurement, distilled water was used as the reference liquid. We measured phase difference between two channels using a vector voltmeter." @default.
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- W1980587513 date "2019-12-21" @default.
- W1980587513 modified "2023-09-26" @default.
- W1980587513 title "Measurements of Particles in Liquid Using Shear-Horizontal Surface Acoustic Wave Sensor" @default.
- W1980587513 doi "https://doi.org/10.1149/1.2214635" @default.
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