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• W1980610503 endingPage "886" @default.
• W1980610503 startingPage "882" @default.
• W1980610503 abstract "The development of an ALD process, which is based on the sequential self-limiting surface reactions from generally two gaseous precursors, requires knowledge of the reactions mechanisms. Most of the studies of ALD modeling have been focused on the surface reactions. However, the most common use of organometallic molecule as gaseous precursors which are generally thermally unstable at temperatures close to the deposition one requires also an understanding of the gas-phase chemical reactions, as for the usual CVD processes. This presentation describes specific examples of the application of mass spectrometry to the determination of the thermal stability and behavior of organometallic precursors used for the ALD deposition of TaN and ZrO2 ultra thin layers." @default.
• W1980610503 created "2016-06-24" @default.
• W1980610503 creator A5001021955 @default.
• W1980610503 creator A5010839493 @default.
• W1980610503 creator A5019235670 @default.
• W1980610503 creator A5020016225 @default.
• W1980610503 creator A5089415918 @default.
• W1980610503 date "2009-12-01" @default.
• W1980610503 modified "2023-10-18" @default.
• W1980610503 title "Experimental thermodynamics for the evaluation of ALD growth processes" @default.
• W1980610503 cites W1978389691 @default.
• W1980610503 cites W1981037214 @default.
• W1980610503 cites W1984839163 @default.
• W1980610503 cites W1987462145 @default.
• W1980610503 cites W1988662053 @default.
• W1980610503 cites W1989283224 @default.
• W1980610503 cites W1991221892 @default.
• W1980610503 cites W1992354480 @default.
• W1980610503 cites W1995191254 @default.
• W1980610503 cites W1995987129 @default.
• W1980610503 cites W1999465816 @default.
• W1980610503 cites W2003076118 @default.
• W1980610503 cites W2003575993 @default.
• W1980610503 cites W2006790596 @default.
• W1980610503 cites W2006899770 @default.
• W1980610503 cites W2017123040 @default.
• W1980610503 cites W2017173496 @default.
• W1980610503 cites W2020560393 @default.
• W1980610503 cites W2022776987 @default.
• W1980610503 cites W2035666905 @default.
• W1980610503 cites W2041246757 @default.
• W1980610503 cites W2044666397 @default.
• W1980610503 cites W2061401558 @default.
• W1980610503 cites W2062051398 @default.
• W1980610503 cites W2068249473 @default.
• W1980610503 cites W2069256603 @default.
• W1980610503 cites W2076891774 @default.
• W1980610503 cites W2084679011 @default.
• W1980610503 cites W2091868805 @default.
• W1980610503 cites W2097157715 @default.
• W1980610503 cites W2119044583 @default.
• W1980610503 cites W2119532907 @default.
• W1980610503 cites W2128659391 @default.
• W1980610503 cites W2145578865 @default.
• W1980610503 cites W2151343581 @default.
• W1980610503 doi "https://doi.org/10.1016/j.surfcoat.2009.08.022" @default.
• W1980610503 hasPublicationYear "2009" @default.
• W1980610503 type Work @default.
• W1980610503 sameAs 1980610503 @default.
• W1980610503 citedByCount "17" @default.
• W1980610503 countsByYear W19806105032012 @default.
• W1980610503 countsByYear W19806105032013 @default.
• W1980610503 countsByYear W19806105032014 @default.
• W1980610503 countsByYear W19806105032015 @default.
• W1980610503 countsByYear W19806105032016 @default.
• W1980610503 countsByYear W19806105032017 @default.
• W1980610503 countsByYear W19806105032018 @default.
• W1980610503 countsByYear W19806105032019 @default.
• W1980610503 countsByYear W19806105032020 @default.
• W1980610503 countsByYear W19806105032021 @default.
• W1980610503 crossrefType "journal-article" @default.
• W1980610503 hasAuthorship W1980610503A5001021955 @default.
• W1980610503 hasAuthorship W1980610503A5010839493 @default.
• W1980610503 hasAuthorship W1980610503A5019235670 @default.
• W1980610503 hasAuthorship W1980610503A5020016225 @default.
• W1980610503 hasAuthorship W1980610503A5089415918 @default.
• W1980610503 hasConcept C121332964 @default.
• W1980610503 hasConcept C127413603 @default.
• W1980610503 hasConcept C151730666 @default.
• W1980610503 hasConcept C159467904 @default.
• W1980610503 hasConcept C162356407 @default.
• W1980610503 hasConcept C171250308 @default.
• W1980610503 hasConcept C178790620 @default.
• W1980610503 hasConcept C185592680 @default.
• W1980610503 hasConcept C188198153 @default.
• W1980610503 hasConcept C19067145 @default.
• W1980610503 hasConcept C192562407 @default.
• W1980610503 hasConcept C2816523 @default.
• W1980610503 hasConcept C42360764 @default.
• W1980610503 hasConcept C43617362 @default.
• W1980610503 hasConcept C57410435 @default.
• W1980610503 hasConcept C59061564 @default.
• W1980610503 hasConcept C64297162 @default.
• W1980610503 hasConcept C69544855 @default.
• W1980610503 hasConcept C78519656 @default.
• W1980610503 hasConcept C86803240 @default.
• W1980610503 hasConcept C97355855 @default.
• W1980610503 hasConceptScore W1980610503C121332964 @default.
• W1980610503 hasConceptScore W1980610503C127413603 @default.
• W1980610503 hasConceptScore W1980610503C151730666 @default.
• W1980610503 hasConceptScore W1980610503C159467904 @default.
• W1980610503 hasConceptScore W1980610503C162356407 @default.
• W1980610503 hasConceptScore W1980610503C171250308 @default.
• W1980610503 hasConceptScore W1980610503C178790620 @default.
• W1980610503 hasConceptScore W1980610503C185592680 @default.
• W1980610503 hasConceptScore W1980610503C188198153 @default.
• W1980610503 hasConceptScore W1980610503C19067145 @default.
• W1980610503 hasConceptScore W1980610503C192562407 @default.

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