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- W1980703539 endingPage "435" @default.
- W1980703539 startingPage "415" @default.
- W1980703539 abstract "Nanoimprint lithography (NIL) is more than a planar high-end technology for the patterning of wafer-like substrates. It is essentially a 3D process, because it replicates various stamp topographies by 3D displacement of material and takes advantage of the bending of stamps while the mold cavities are filled. But at the same time, it keeps all assets of a 2D technique being able to pattern thin masking layers like in photon- and electron-based traditional lithography. This review reports about 20 years of development of replication techniques at Paul Scherrer Institut, with a focus on 3D aspects of molding, which enable NIL to stay 2D, but at the same time enable 3D applications which are “more than Moore.” As an example, the manufacturing of a demonstrator for backlighting applications based on thermally activated selective topography equilibration will be presented. This technique allows generating almost arbitrary sloped, convex and concave profiles in the same polymer film with dimensions in micro- and nanometer scale." @default.
- W1980703539 created "2016-06-24" @default.
- W1980703539 creator A5071779530 @default.
- W1980703539 date "2015-04-01" @default.
- W1980703539 modified "2023-10-14" @default.
- W1980703539 title "Nanoimprint lithography: 2D or not 2D? A review" @default.
- W1980703539 cites W120432120 @default.
- W1980703539 cites W1964672081 @default.
- W1980703539 cites W1964952369 @default.
- W1980703539 cites W1964966924 @default.
- W1980703539 cites W1965722892 @default.
- W1980703539 cites W1967178809 @default.
- W1980703539 cites W1967875751 @default.
- W1980703539 cites W1969967707 @default.
- W1980703539 cites W1970252689 @default.
- W1980703539 cites W1971862492 @default.
- W1980703539 cites W1973535046 @default.
- W1980703539 cites W1977069432 @default.
- W1980703539 cites W1978414317 @default.
- W1980703539 cites W1979545057 @default.
- W1980703539 cites W1980590573 @default.
- W1980703539 cites W1980882156 @default.
- W1980703539 cites W1983114298 @default.
- W1980703539 cites W1983370720 @default.
- W1980703539 cites W1983772203 @default.
- W1980703539 cites W1984431257 @default.
- W1980703539 cites W1985472516 @default.
- W1980703539 cites W1986887813 @default.
- W1980703539 cites W1987161018 @default.
- W1980703539 cites W1987648391 @default.
- W1980703539 cites W1987830087 @default.
- W1980703539 cites W1989297207 @default.
- W1980703539 cites W1990691815 @default.
- W1980703539 cites W1991142854 @default.
- W1980703539 cites W1992249347 @default.
- W1980703539 cites W1993262467 @default.
- W1980703539 cites W1994101913 @default.
- W1980703539 cites W1994728170 @default.
- W1980703539 cites W1995251023 @default.
- W1980703539 cites W1996389496 @default.
- W1980703539 cites W1996935462 @default.
- W1980703539 cites W1997235135 @default.
- W1980703539 cites W1997842505 @default.
- W1980703539 cites W2000184766 @default.
- W1980703539 cites W2002090153 @default.
- W1980703539 cites W2002732459 @default.
- W1980703539 cites W2003164958 @default.
- W1980703539 cites W2005101948 @default.
- W1980703539 cites W2006215044 @default.
- W1980703539 cites W2008532079 @default.
- W1980703539 cites W2011686879 @default.
- W1980703539 cites W2013540376 @default.
- W1980703539 cites W2015533114 @default.
- W1980703539 cites W2016891575 @default.
- W1980703539 cites W2017231440 @default.
- W1980703539 cites W2019497925 @default.
- W1980703539 cites W2021340518 @default.
- W1980703539 cites W2022948920 @default.
- W1980703539 cites W2024304372 @default.
- W1980703539 cites W2024340377 @default.
- W1980703539 cites W2024537993 @default.
- W1980703539 cites W2027123515 @default.
- W1980703539 cites W2029413531 @default.
- W1980703539 cites W2029422697 @default.
- W1980703539 cites W2029629733 @default.
- W1980703539 cites W2029836473 @default.
- W1980703539 cites W2030164607 @default.
- W1980703539 cites W2030740830 @default.
- W1980703539 cites W2031805743 @default.
- W1980703539 cites W2031953391 @default.
- W1980703539 cites W2034356746 @default.
- W1980703539 cites W2035432717 @default.
- W1980703539 cites W2036259874 @default.
- W1980703539 cites W2037259746 @default.
- W1980703539 cites W2038876225 @default.
- W1980703539 cites W2040851458 @default.
- W1980703539 cites W2044447213 @default.
- W1980703539 cites W2047389762 @default.
- W1980703539 cites W2047928165 @default.
- W1980703539 cites W2049736064 @default.
- W1980703539 cites W2052457018 @default.
- W1980703539 cites W2053130740 @default.
- W1980703539 cites W2053869765 @default.
- W1980703539 cites W2054460607 @default.
- W1980703539 cites W2055430199 @default.
- W1980703539 cites W2055963498 @default.
- W1980703539 cites W2057961617 @default.
- W1980703539 cites W2058404465 @default.
- W1980703539 cites W2058609110 @default.
- W1980703539 cites W2059027054 @default.
- W1980703539 cites W2062074587 @default.
- W1980703539 cites W2062096269 @default.
- W1980703539 cites W2062482809 @default.
- W1980703539 cites W2063526355 @default.
- W1980703539 cites W2063970416 @default.
- W1980703539 cites W2064115652 @default.
- W1980703539 cites W2067223314 @default.
- W1980703539 cites W2068276297 @default.