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- W1980806380 abstract "In this paper, logic device patterning of 0.16-micrometer trenches for the 0.13-micrometer node using 248-nm light and 0.13-micrometer trenches for the 0.10-micrometer node using 193-nm light is investigated. Severe proximity effect through all pitches and small depth of focus for isolated trenches bring great challenges. To produce manufacture-worthy process windows, lithographic techniques such as optical proximity correction, annular illumination, sub-resolution assist features, and attenuated phase-shift mask are considered. No prominent performance gain is achieved in the aforementioned combination if full-pitch-range performance is required. However, manufacture-worthy 0.5-micrometer depth of focus can be obtained through all pitches by replacing annular illumination with quadrupole illumination while retaining sub- resolution assist features and optical proximity correction, even without having to resort to attenuated phase-shifting mask. We also observe that attenuated phase-shift mask or dipole illumination improves depth of focus and photoresist profile of dense patterns only in the cases studied." @default.
- W1980806380 created "2016-06-24" @default.
- W1980806380 creator A5003188805 @default.
- W1980806380 creator A5019082031 @default.
- W1980806380 creator A5039030237 @default.
- W1980806380 creator A5045833573 @default.
- W1980806380 creator A5048964576 @default.
- W1980806380 creator A5076979836 @default.
- W1980806380 creator A5089416152 @default.
- W1980806380 date "2001-09-14" @default.
- W1980806380 modified "2023-09-27" @default.
- W1980806380 title "Trench pattern lithography for 0.13- and 0.10-μm logic devices at 248-nm and 193-nm wavelengths" @default.
- W1980806380 doi "https://doi.org/10.1117/12.435728" @default.
- W1980806380 hasPublicationYear "2001" @default.
- W1980806380 type Work @default.
- W1980806380 sameAs 1980806380 @default.
- W1980806380 citedByCount "2" @default.
- W1980806380 crossrefType "proceedings-article" @default.
- W1980806380 hasAuthorship W1980806380A5003188805 @default.
- W1980806380 hasAuthorship W1980806380A5019082031 @default.
- W1980806380 hasAuthorship W1980806380A5039030237 @default.
- W1980806380 hasAuthorship W1980806380A5045833573 @default.
- W1980806380 hasAuthorship W1980806380A5048964576 @default.
- W1980806380 hasAuthorship W1980806380A5076979836 @default.
- W1980806380 hasAuthorship W1980806380A5089416152 @default.
- W1980806380 hasConcept C100460472 @default.
- W1980806380 hasConcept C105487726 @default.
- W1980806380 hasConcept C120665830 @default.
- W1980806380 hasConcept C121332964 @default.
- W1980806380 hasConcept C134406635 @default.
- W1980806380 hasConcept C151730666 @default.
- W1980806380 hasConcept C155310634 @default.
- W1980806380 hasConcept C171250308 @default.
- W1980806380 hasConcept C171635847 @default.
- W1980806380 hasConcept C192209626 @default.
- W1980806380 hasConcept C192562407 @default.
- W1980806380 hasConcept C204223013 @default.
- W1980806380 hasConcept C2779227376 @default.
- W1980806380 hasConcept C49040817 @default.
- W1980806380 hasConcept C53524968 @default.
- W1980806380 hasConcept C58097730 @default.
- W1980806380 hasConcept C6260449 @default.
- W1980806380 hasConcept C77928131 @default.
- W1980806380 hasConcept C86803240 @default.
- W1980806380 hasConcept C89002693 @default.
- W1980806380 hasConceptScore W1980806380C100460472 @default.
- W1980806380 hasConceptScore W1980806380C105487726 @default.
- W1980806380 hasConceptScore W1980806380C120665830 @default.
- W1980806380 hasConceptScore W1980806380C121332964 @default.
- W1980806380 hasConceptScore W1980806380C134406635 @default.
- W1980806380 hasConceptScore W1980806380C151730666 @default.
- W1980806380 hasConceptScore W1980806380C155310634 @default.
- W1980806380 hasConceptScore W1980806380C171250308 @default.
- W1980806380 hasConceptScore W1980806380C171635847 @default.
- W1980806380 hasConceptScore W1980806380C192209626 @default.
- W1980806380 hasConceptScore W1980806380C192562407 @default.
- W1980806380 hasConceptScore W1980806380C204223013 @default.
- W1980806380 hasConceptScore W1980806380C2779227376 @default.
- W1980806380 hasConceptScore W1980806380C49040817 @default.
- W1980806380 hasConceptScore W1980806380C53524968 @default.
- W1980806380 hasConceptScore W1980806380C58097730 @default.
- W1980806380 hasConceptScore W1980806380C6260449 @default.
- W1980806380 hasConceptScore W1980806380C77928131 @default.
- W1980806380 hasConceptScore W1980806380C86803240 @default.
- W1980806380 hasConceptScore W1980806380C89002693 @default.
- W1980806380 hasLocation W19808063801 @default.
- W1980806380 hasOpenAccess W1980806380 @default.
- W1980806380 hasPrimaryLocation W19808063801 @default.
- W1980806380 hasRelatedWork W1973426647 @default.
- W1980806380 hasRelatedWork W1991804230 @default.
- W1980806380 hasRelatedWork W1993572438 @default.
- W1980806380 hasRelatedWork W2012824115 @default.
- W1980806380 hasRelatedWork W2040049270 @default.
- W1980806380 hasRelatedWork W2044480683 @default.
- W1980806380 hasRelatedWork W2051654237 @default.
- W1980806380 hasRelatedWork W2076690315 @default.
- W1980806380 hasRelatedWork W2156106583 @default.
- W1980806380 hasRelatedWork W1792949897 @default.
- W1980806380 isParatext "false" @default.
- W1980806380 isRetracted "false" @default.
- W1980806380 magId "1980806380" @default.
- W1980806380 workType "article" @default.