Matches in SemOpenAlex for { <https://semopenalex.org/work/W1981014595> ?p ?o ?g. }
Showing items 1 to 64 of
64
with 100 items per page.
- W1981014595 abstract "Electron beam writing of fine features usually requires correction of proximity effects to achieve accurate edge placement. One scheme to reduce proximity effects is to increase the accelerating voltage (> 40 keV) [1]. We have chosen to look the other way, at low energy (< 5 keV) electron beam exposure. Retarding field electron optics enables one to form fine beams of low energy electrons. The inorganic resist system Ag<sub>2</sub>Se/GeSe<sub>x</sub> is well suited for low energy electron beam exposure due to its thin active region and conductive top layer. We report here on the effects of reducing the landing energy of the exposing electrons both in terms of sensitivity and proximity effects. Also we report on the absence of any edge sharpening effects for electron beam exposure and the effect of exposure rate on the required dose." @default.
- W1981014595 created "2016-06-24" @default.
- W1981014595 creator A5014358658 @default.
- W1981014595 creator A5018240386 @default.
- W1981014595 date "1983-11-07" @default.
- W1981014595 modified "2023-09-25" @default.
- W1981014595 title "<title>Electron Beam Exposure Of GeSe<formula><inf><roman>x</roman></inf></formula></title>" @default.
- W1981014595 doi "https://doi.org/10.1117/12.935090" @default.
- W1981014595 hasPublicationYear "1983" @default.
- W1981014595 type Work @default.
- W1981014595 sameAs 1981014595 @default.
- W1981014595 citedByCount "4" @default.
- W1981014595 crossrefType "proceedings-article" @default.
- W1981014595 hasAuthorship W1981014595A5014358658 @default.
- W1981014595 hasAuthorship W1981014595A5018240386 @default.
- W1981014595 hasConcept C120665830 @default.
- W1981014595 hasConcept C121332964 @default.
- W1981014595 hasConcept C147120987 @default.
- W1981014595 hasConcept C162307627 @default.
- W1981014595 hasConcept C168834538 @default.
- W1981014595 hasConcept C171250308 @default.
- W1981014595 hasConcept C184779094 @default.
- W1981014595 hasConcept C185544564 @default.
- W1981014595 hasConcept C192562407 @default.
- W1981014595 hasConcept C2779227376 @default.
- W1981014595 hasConcept C2781137444 @default.
- W1981014595 hasConcept C31972630 @default.
- W1981014595 hasConcept C41008148 @default.
- W1981014595 hasConcept C53524968 @default.
- W1981014595 hasConcept C76155785 @default.
- W1981014595 hasConcept C95312477 @default.
- W1981014595 hasConceptScore W1981014595C120665830 @default.
- W1981014595 hasConceptScore W1981014595C121332964 @default.
- W1981014595 hasConceptScore W1981014595C147120987 @default.
- W1981014595 hasConceptScore W1981014595C162307627 @default.
- W1981014595 hasConceptScore W1981014595C168834538 @default.
- W1981014595 hasConceptScore W1981014595C171250308 @default.
- W1981014595 hasConceptScore W1981014595C184779094 @default.
- W1981014595 hasConceptScore W1981014595C185544564 @default.
- W1981014595 hasConceptScore W1981014595C192562407 @default.
- W1981014595 hasConceptScore W1981014595C2779227376 @default.
- W1981014595 hasConceptScore W1981014595C2781137444 @default.
- W1981014595 hasConceptScore W1981014595C31972630 @default.
- W1981014595 hasConceptScore W1981014595C41008148 @default.
- W1981014595 hasConceptScore W1981014595C53524968 @default.
- W1981014595 hasConceptScore W1981014595C76155785 @default.
- W1981014595 hasConceptScore W1981014595C95312477 @default.
- W1981014595 hasLocation W19810145951 @default.
- W1981014595 hasOpenAccess W1981014595 @default.
- W1981014595 hasPrimaryLocation W19810145951 @default.
- W1981014595 hasRelatedWork W1855677853 @default.
- W1981014595 hasRelatedWork W1993552510 @default.
- W1981014595 hasRelatedWork W2005579321 @default.
- W1981014595 hasRelatedWork W2039287653 @default.
- W1981014595 hasRelatedWork W2070480731 @default.
- W1981014595 hasRelatedWork W2363150811 @default.
- W1981014595 hasRelatedWork W2557653631 @default.
- W1981014595 hasRelatedWork W2791782882 @default.
- W1981014595 hasRelatedWork W2810584733 @default.
- W1981014595 hasRelatedWork W2526321854 @default.
- W1981014595 isParatext "false" @default.
- W1981014595 isRetracted "false" @default.
- W1981014595 magId "1981014595" @default.
- W1981014595 workType "article" @default.