Matches in SemOpenAlex for { <https://semopenalex.org/work/W1981015024> ?p ?o ?g. }
- W1981015024 endingPage "149" @default.
- W1981015024 startingPage "144" @default.
- W1981015024 abstract "Microsens has developed miniaturized integrated semiconductor gas sensors using standard microelectronic technologies; these sensors include a semiconducting metal oxide layer (SnO2, Nb2O5) and an integrated heater on a silicon substrate. The selectivity and sensitivity of the devices to oxidizing or reducing gases depend on the metal oxide, on its doping and on the selection of an appropriate working temperature. Recently, in collaboration with LASMEA, the same microelectronic device has been used to develop gas sensors on which the metal oxide layer is replaced by a phthalocyanine thin film. Phthalocyanines are known to be sensitive to oxidizing gases at ppm concentrations, and the specificity of their responses makes them potential gas sensors or complementary elements of SnO2 in th realization of multi-array integrated gas sensors. This papers describes the successive steps of the manufacturing of miniaturized phthalocyanine gas sensors and shows that deposition of phthalocyanine thin films by evaporation is compatible with microelectronic technologies. Responses of CuPc and AlPcFn films to NO2, HCl and CO are reported. Each gas induces conductivity variations on both phthalocyanines; these variations are qualitatively and quantitatively different depending on the gas-phthalocyanine pair." @default.
- W1981015024 created "2016-06-24" @default.
- W1981015024 creator A5012368272 @default.
- W1981015024 creator A5022542622 @default.
- W1981015024 creator A5033260212 @default.
- W1981015024 creator A5037133303 @default.
- W1981015024 creator A5039294475 @default.
- W1981015024 creator A5052667789 @default.
- W1981015024 creator A5069579111 @default.
- W1981015024 creator A5070609074 @default.
- W1981015024 creator A5072038816 @default.
- W1981015024 creator A5081378353 @default.
- W1981015024 date "1995-01-01" @default.
- W1981015024 modified "2023-10-01" @default.
- W1981015024 title "Elaboration and tests of microelectronically designed gas sensors with phthalocyanine sensitive layers" @default.
- W1981015024 cites W1963498535 @default.
- W1981015024 cites W2019718851 @default.
- W1981015024 cites W2025071407 @default.
- W1981015024 cites W2026148911 @default.
- W1981015024 cites W2029260951 @default.
- W1981015024 cites W2066121125 @default.
- W1981015024 cites W2068650717 @default.
- W1981015024 doi "https://doi.org/10.1016/0925-4005(94)01575-3" @default.
- W1981015024 hasPublicationYear "1995" @default.
- W1981015024 type Work @default.
- W1981015024 sameAs 1981015024 @default.
- W1981015024 citedByCount "21" @default.
- W1981015024 countsByYear W19810150242012 @default.
- W1981015024 countsByYear W19810150242013 @default.
- W1981015024 countsByYear W19810150242014 @default.
- W1981015024 countsByYear W19810150242018 @default.
- W1981015024 crossrefType "journal-article" @default.
- W1981015024 hasAuthorship W1981015024A5012368272 @default.
- W1981015024 hasAuthorship W1981015024A5022542622 @default.
- W1981015024 hasAuthorship W1981015024A5033260212 @default.
- W1981015024 hasAuthorship W1981015024A5037133303 @default.
- W1981015024 hasAuthorship W1981015024A5039294475 @default.
- W1981015024 hasAuthorship W1981015024A5052667789 @default.
- W1981015024 hasAuthorship W1981015024A5069579111 @default.
- W1981015024 hasAuthorship W1981015024A5070609074 @default.
- W1981015024 hasAuthorship W1981015024A5072038816 @default.
- W1981015024 hasAuthorship W1981015024A5081378353 @default.
- W1981015024 hasConcept C108225325 @default.
- W1981015024 hasConcept C111368507 @default.
- W1981015024 hasConcept C121332964 @default.
- W1981015024 hasConcept C127313418 @default.
- W1981015024 hasConcept C171250308 @default.
- W1981015024 hasConcept C178790620 @default.
- W1981015024 hasConcept C185592680 @default.
- W1981015024 hasConcept C187937830 @default.
- W1981015024 hasConcept C19067145 @default.
- W1981015024 hasConcept C191897082 @default.
- W1981015024 hasConcept C192562407 @default.
- W1981015024 hasConcept C2777289219 @default.
- W1981015024 hasConcept C2779227376 @default.
- W1981015024 hasConcept C2779851234 @default.
- W1981015024 hasConcept C2780761128 @default.
- W1981015024 hasConcept C49040817 @default.
- W1981015024 hasConcept C544956773 @default.
- W1981015024 hasConcept C61441594 @default.
- W1981015024 hasConcept C77176794 @default.
- W1981015024 hasConcept C97355855 @default.
- W1981015024 hasConceptScore W1981015024C108225325 @default.
- W1981015024 hasConceptScore W1981015024C111368507 @default.
- W1981015024 hasConceptScore W1981015024C121332964 @default.
- W1981015024 hasConceptScore W1981015024C127313418 @default.
- W1981015024 hasConceptScore W1981015024C171250308 @default.
- W1981015024 hasConceptScore W1981015024C178790620 @default.
- W1981015024 hasConceptScore W1981015024C185592680 @default.
- W1981015024 hasConceptScore W1981015024C187937830 @default.
- W1981015024 hasConceptScore W1981015024C19067145 @default.
- W1981015024 hasConceptScore W1981015024C191897082 @default.
- W1981015024 hasConceptScore W1981015024C192562407 @default.
- W1981015024 hasConceptScore W1981015024C2777289219 @default.
- W1981015024 hasConceptScore W1981015024C2779227376 @default.
- W1981015024 hasConceptScore W1981015024C2779851234 @default.
- W1981015024 hasConceptScore W1981015024C2780761128 @default.
- W1981015024 hasConceptScore W1981015024C49040817 @default.
- W1981015024 hasConceptScore W1981015024C544956773 @default.
- W1981015024 hasConceptScore W1981015024C61441594 @default.
- W1981015024 hasConceptScore W1981015024C77176794 @default.
- W1981015024 hasConceptScore W1981015024C97355855 @default.
- W1981015024 hasIssue "1-3" @default.
- W1981015024 hasLocation W19810150241 @default.
- W1981015024 hasOpenAccess W1981015024 @default.
- W1981015024 hasPrimaryLocation W19810150241 @default.
- W1981015024 hasRelatedWork W1966833149 @default.
- W1981015024 hasRelatedWork W1990306124 @default.
- W1981015024 hasRelatedWork W2019826257 @default.
- W1981015024 hasRelatedWork W2050298249 @default.
- W1981015024 hasRelatedWork W2139871202 @default.
- W1981015024 hasRelatedWork W2146107783 @default.
- W1981015024 hasRelatedWork W2315493325 @default.
- W1981015024 hasRelatedWork W2516754555 @default.
- W1981015024 hasRelatedWork W823364632 @default.
- W1981015024 hasRelatedWork W2618928125 @default.
- W1981015024 hasVolume "26" @default.
- W1981015024 isParatext "false" @default.