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- W1981103359 endingPage "50" @default.
- W1981103359 startingPage "47" @default.
- W1981103359 abstract "A chemically amplified resist (UVIII) is assessed for a mix-and-match approach to lithography using both optical and electron beam exposures, followed by a single development step. The order in which exposures take place is found not to influence behaviour, other than a loss in sensitivity to either type of exposure, resulting from the delay under vacuum. This loss in sensitivity can be accounted for simply by increasing the dose for parts of the pattern exposed earlier in the e-beam system. The dependence of the contrast on processing conditions is found to depend on the method of exposure." @default.
- W1981103359 created "2016-06-24" @default.
- W1981103359 creator A5005600792 @default.
- W1981103359 creator A5028428423 @default.
- W1981103359 creator A5034990021 @default.
- W1981103359 creator A5037373037 @default.
- W1981103359 date "2005-03-01" @default.
- W1981103359 modified "2023-09-27" @default.
- W1981103359 title "UVIII for combined e-beam and optical exposure hybrid lithography" @default.
- W1981103359 cites W1995471447 @default.
- W1981103359 cites W1997209382 @default.
- W1981103359 cites W2003951707 @default.
- W1981103359 cites W2034217534 @default.
- W1981103359 cites W2039130783 @default.
- W1981103359 cites W2070672330 @default.
- W1981103359 doi "https://doi.org/10.1016/j.mee.2004.12.008" @default.
- W1981103359 hasPublicationYear "2005" @default.
- W1981103359 type Work @default.
- W1981103359 sameAs 1981103359 @default.
- W1981103359 citedByCount "6" @default.
- W1981103359 countsByYear W19811033592012 @default.
- W1981103359 countsByYear W19811033592014 @default.
- W1981103359 countsByYear W19811033592017 @default.
- W1981103359 crossrefType "journal-article" @default.
- W1981103359 hasAuthorship W1981103359A5005600792 @default.
- W1981103359 hasAuthorship W1981103359A5028428423 @default.
- W1981103359 hasAuthorship W1981103359A5034990021 @default.
- W1981103359 hasAuthorship W1981103359A5037373037 @default.
- W1981103359 hasConcept C105487726 @default.
- W1981103359 hasConcept C120665830 @default.
- W1981103359 hasConcept C121332964 @default.
- W1981103359 hasConcept C127413603 @default.
- W1981103359 hasConcept C168834538 @default.
- W1981103359 hasConcept C171250308 @default.
- W1981103359 hasConcept C192562407 @default.
- W1981103359 hasConcept C200274948 @default.
- W1981103359 hasConcept C204223013 @default.
- W1981103359 hasConcept C21200559 @default.
- W1981103359 hasConcept C24326235 @default.
- W1981103359 hasConcept C2779227376 @default.
- W1981103359 hasConcept C2779990520 @default.
- W1981103359 hasConcept C49040817 @default.
- W1981103359 hasConcept C53524968 @default.
- W1981103359 hasConcept C94263209 @default.
- W1981103359 hasConceptScore W1981103359C105487726 @default.
- W1981103359 hasConceptScore W1981103359C120665830 @default.
- W1981103359 hasConceptScore W1981103359C121332964 @default.
- W1981103359 hasConceptScore W1981103359C127413603 @default.
- W1981103359 hasConceptScore W1981103359C168834538 @default.
- W1981103359 hasConceptScore W1981103359C171250308 @default.
- W1981103359 hasConceptScore W1981103359C192562407 @default.
- W1981103359 hasConceptScore W1981103359C200274948 @default.
- W1981103359 hasConceptScore W1981103359C204223013 @default.
- W1981103359 hasConceptScore W1981103359C21200559 @default.
- W1981103359 hasConceptScore W1981103359C24326235 @default.
- W1981103359 hasConceptScore W1981103359C2779227376 @default.
- W1981103359 hasConceptScore W1981103359C2779990520 @default.
- W1981103359 hasConceptScore W1981103359C49040817 @default.
- W1981103359 hasConceptScore W1981103359C53524968 @default.
- W1981103359 hasConceptScore W1981103359C94263209 @default.
- W1981103359 hasLocation W19811033591 @default.
- W1981103359 hasOpenAccess W1981103359 @default.
- W1981103359 hasPrimaryLocation W19811033591 @default.
- W1981103359 hasRelatedWork W1451772226 @default.
- W1981103359 hasRelatedWork W1970515825 @default.
- W1981103359 hasRelatedWork W1984343152 @default.
- W1981103359 hasRelatedWork W2000454316 @default.
- W1981103359 hasRelatedWork W2003241729 @default.
- W1981103359 hasRelatedWork W2024587301 @default.
- W1981103359 hasRelatedWork W2074395758 @default.
- W1981103359 hasRelatedWork W2118954929 @default.
- W1981103359 hasRelatedWork W3150098593 @default.
- W1981103359 hasRelatedWork W4321635716 @default.
- W1981103359 hasVolume "78-79" @default.
- W1981103359 isParatext "false" @default.
- W1981103359 isRetracted "false" @default.
- W1981103359 magId "1981103359" @default.
- W1981103359 workType "article" @default.