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- W1981120168 abstract "The author of this paper has adopted a new high-accuracy main shaft rotation numerical phase locking automatic regulation system at the ultra-precision radial grating generating machine, designed a new kind of photoetch-system of cylindrical 'honeycomb' lens, and advanced a new high -speed carving method, The small-sized high-resolution radial grating has been developed, with a carving diameter of less than 50mm and the number of carved lines is about 32768 line couplesThe greatest diameter error is le2s than 0. 5sec, of arc even error is less than 5 per cent," @default.
- W1981120168 created "2016-06-24" @default.
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- W1981120168 date "1993-09-22" @default.
- W1981120168 modified "2023-09-25" @default.
- W1981120168 title "Research on the small-sized high-resolution radial grating" @default.
- W1981120168 doi "https://doi.org/10.1117/12.156375" @default.
- W1981120168 hasPublicationYear "1993" @default.
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