Matches in SemOpenAlex for { <https://semopenalex.org/work/W1981138669> ?p ?o ?g. }
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- W1981138669 endingPage "4460" @default.
- W1981138669 startingPage "4448" @default.
- W1981138669 abstract "The effect of anisotropy on the response and fracture pattern on scratching {1 0 0} and {1 1 1} single crystal silicon wafers in two characteristic directions, i.e. 〈1 0 0〉 and 〈1 1 0〉 in a {1 0 0} wafer, and 〈1 1 0〉 and 〈1 1 2〉 in a {1 1 1} wafer, respectively, was studied. Predictions of the locations of the onset of fracture, as well as the fracture patterns on the wafer surfaces, were obtained applying a “minimum crack length” criterion assisted by numerical determination of the stress states using the finite element method. It was found that the first crack appears on the {1 1 1} or {1 1 0} cleavage plane. The 〈1 1 2〉 scratching direction on the {1 1 1} wafer is the weakest among the four directions studied, since it provides the highest resolved tensile stress and the shortest initial defect for crack propagation. The 〈1 0 0〉 scratching direction in the {1 0 0} wafer appears to be strongest. Experiments validated the approach and also showed a higher reliability in the {1 0 0}〈1 0 0〉 and {1 1 1}〈1 1 0〉 directions. The methodology used in this manuscript can be applied to the determination of fracture patterns in other single crystal materials, under scratching or other mechanical loading conditions." @default.
- W1981138669 created "2016-06-24" @default.
- W1981138669 creator A5019560636 @default.
- W1981138669 creator A5027312616 @default.
- W1981138669 creator A5073116336 @default.
- W1981138669 date "2012-06-01" @default.
- W1981138669 modified "2023-10-16" @default.
- W1981138669 title "Mechanics prediction of the fracture pattern on scratching wafers of single crystal silicon" @default.
- W1981138669 cites W1980101902 @default.
- W1981138669 cites W2003524466 @default.
- W1981138669 cites W2007290941 @default.
- W1981138669 cites W2014192316 @default.
- W1981138669 cites W2024429269 @default.
- W1981138669 cites W2024932674 @default.
- W1981138669 cites W2059833547 @default.
- W1981138669 cites W2059929728 @default.
- W1981138669 cites W2061150627 @default.
- W1981138669 cites W2066552032 @default.
- W1981138669 cites W2069932006 @default.
- W1981138669 cites W2093260848 @default.
- W1981138669 cites W2105046141 @default.
- W1981138669 cites W2146403893 @default.
- W1981138669 doi "https://doi.org/10.1016/j.actamat.2012.04.040" @default.
- W1981138669 hasPublicationYear "2012" @default.
- W1981138669 type Work @default.
- W1981138669 sameAs 1981138669 @default.
- W1981138669 citedByCount "18" @default.
- W1981138669 countsByYear W19811386692013 @default.
- W1981138669 countsByYear W19811386692014 @default.
- W1981138669 countsByYear W19811386692015 @default.
- W1981138669 countsByYear W19811386692016 @default.
- W1981138669 countsByYear W19811386692017 @default.
- W1981138669 countsByYear W19811386692018 @default.
- W1981138669 countsByYear W19811386692019 @default.
- W1981138669 countsByYear W19811386692020 @default.
- W1981138669 countsByYear W19811386692022 @default.
- W1981138669 countsByYear W19811386692023 @default.
- W1981138669 crossrefType "journal-article" @default.
- W1981138669 hasAuthorship W1981138669A5019560636 @default.
- W1981138669 hasAuthorship W1981138669A5027312616 @default.
- W1981138669 hasAuthorship W1981138669A5073116336 @default.
- W1981138669 hasConcept C120665830 @default.
- W1981138669 hasConcept C121332964 @default.
- W1981138669 hasConcept C127413603 @default.
- W1981138669 hasConcept C138885662 @default.
- W1981138669 hasConcept C159985019 @default.
- W1981138669 hasConcept C160671074 @default.
- W1981138669 hasConcept C171250308 @default.
- W1981138669 hasConcept C175156509 @default.
- W1981138669 hasConcept C191897082 @default.
- W1981138669 hasConcept C192562407 @default.
- W1981138669 hasConcept C21036866 @default.
- W1981138669 hasConcept C2780196728 @default.
- W1981138669 hasConcept C41895202 @default.
- W1981138669 hasConcept C43369102 @default.
- W1981138669 hasConcept C544956773 @default.
- W1981138669 hasConcept C59085676 @default.
- W1981138669 hasConcept C66938386 @default.
- W1981138669 hasConcept C85725439 @default.
- W1981138669 hasConceptScore W1981138669C120665830 @default.
- W1981138669 hasConceptScore W1981138669C121332964 @default.
- W1981138669 hasConceptScore W1981138669C127413603 @default.
- W1981138669 hasConceptScore W1981138669C138885662 @default.
- W1981138669 hasConceptScore W1981138669C159985019 @default.
- W1981138669 hasConceptScore W1981138669C160671074 @default.
- W1981138669 hasConceptScore W1981138669C171250308 @default.
- W1981138669 hasConceptScore W1981138669C175156509 @default.
- W1981138669 hasConceptScore W1981138669C191897082 @default.
- W1981138669 hasConceptScore W1981138669C192562407 @default.
- W1981138669 hasConceptScore W1981138669C21036866 @default.
- W1981138669 hasConceptScore W1981138669C2780196728 @default.
- W1981138669 hasConceptScore W1981138669C41895202 @default.
- W1981138669 hasConceptScore W1981138669C43369102 @default.
- W1981138669 hasConceptScore W1981138669C544956773 @default.
- W1981138669 hasConceptScore W1981138669C59085676 @default.
- W1981138669 hasConceptScore W1981138669C66938386 @default.
- W1981138669 hasConceptScore W1981138669C85725439 @default.
- W1981138669 hasIssue "11" @default.
- W1981138669 hasLocation W19811386691 @default.
- W1981138669 hasOpenAccess W1981138669 @default.
- W1981138669 hasPrimaryLocation W19811386691 @default.
- W1981138669 hasRelatedWork W13033540 @default.
- W1981138669 hasRelatedWork W1966968696 @default.
- W1981138669 hasRelatedWork W1980331248 @default.
- W1981138669 hasRelatedWork W2007842360 @default.
- W1981138669 hasRelatedWork W2011602713 @default.
- W1981138669 hasRelatedWork W2118193002 @default.
- W1981138669 hasRelatedWork W2321777446 @default.
- W1981138669 hasRelatedWork W2472510070 @default.
- W1981138669 hasRelatedWork W2735730799 @default.
- W1981138669 hasRelatedWork W3039613521 @default.
- W1981138669 hasVolume "60" @default.
- W1981138669 isParatext "false" @default.
- W1981138669 isRetracted "false" @default.
- W1981138669 magId "1981138669" @default.
- W1981138669 workType "article" @default.