Matches in SemOpenAlex for { <https://semopenalex.org/work/W1981197231> ?p ?o ?g. }
Showing items 1 to 77 of
77
with 100 items per page.
- W1981197231 endingPage "369" @default.
- W1981197231 startingPage "368" @default.
- W1981197231 abstract "Suppression of oxidation-induced stacking faults and microdefects in a Si wafer, subjected to bending during thermal oxidation, was studied. Straight dislocations were introduced only at the neutral plane in Si bulk, during bending in a furnace and retained as sinks through all subsequent high-temperature processings, thereby continuing to suppress the formation of oxidation-induced stacking faults and microdefects. Gettering while applying bending stress to the wafer is described, including the formation mechanism for dislocations at the neutral region." @default.
- W1981197231 created "2016-06-24" @default.
- W1981197231 creator A5037204781 @default.
- W1981197231 creator A5041123909 @default.
- W1981197231 creator A5065976391 @default.
- W1981197231 date "1981-03-01" @default.
- W1981197231 modified "2023-10-18" @default.
- W1981197231 title "Gettering of crystalline defects in Si by bending" @default.
- W1981197231 cites W1596081179 @default.
- W1981197231 cites W2027484652 @default.
- W1981197231 cites W2049261662 @default.
- W1981197231 cites W2051265858 @default.
- W1981197231 cites W2085093267 @default.
- W1981197231 cites W2087783518 @default.
- W1981197231 cites W2948727882 @default.
- W1981197231 doi "https://doi.org/10.1063/1.92340" @default.
- W1981197231 hasPublicationYear "1981" @default.
- W1981197231 type Work @default.
- W1981197231 sameAs 1981197231 @default.
- W1981197231 citedByCount "1" @default.
- W1981197231 crossrefType "journal-article" @default.
- W1981197231 hasAuthorship W1981197231A5037204781 @default.
- W1981197231 hasAuthorship W1981197231A5041123909 @default.
- W1981197231 hasAuthorship W1981197231A5065976391 @default.
- W1981197231 hasConcept C125099081 @default.
- W1981197231 hasConcept C138885662 @default.
- W1981197231 hasConcept C159985019 @default.
- W1981197231 hasConcept C160671074 @default.
- W1981197231 hasConcept C164675345 @default.
- W1981197231 hasConcept C178790620 @default.
- W1981197231 hasConcept C185592680 @default.
- W1981197231 hasConcept C192562407 @default.
- W1981197231 hasConcept C21036866 @default.
- W1981197231 hasConcept C2779281663 @default.
- W1981197231 hasConcept C33347731 @default.
- W1981197231 hasConcept C41895202 @default.
- W1981197231 hasConcept C49040817 @default.
- W1981197231 hasConcept C544956773 @default.
- W1981197231 hasConcept C8010536 @default.
- W1981197231 hasConcept C87210426 @default.
- W1981197231 hasConceptScore W1981197231C125099081 @default.
- W1981197231 hasConceptScore W1981197231C138885662 @default.
- W1981197231 hasConceptScore W1981197231C159985019 @default.
- W1981197231 hasConceptScore W1981197231C160671074 @default.
- W1981197231 hasConceptScore W1981197231C164675345 @default.
- W1981197231 hasConceptScore W1981197231C178790620 @default.
- W1981197231 hasConceptScore W1981197231C185592680 @default.
- W1981197231 hasConceptScore W1981197231C192562407 @default.
- W1981197231 hasConceptScore W1981197231C21036866 @default.
- W1981197231 hasConceptScore W1981197231C2779281663 @default.
- W1981197231 hasConceptScore W1981197231C33347731 @default.
- W1981197231 hasConceptScore W1981197231C41895202 @default.
- W1981197231 hasConceptScore W1981197231C49040817 @default.
- W1981197231 hasConceptScore W1981197231C544956773 @default.
- W1981197231 hasConceptScore W1981197231C8010536 @default.
- W1981197231 hasConceptScore W1981197231C87210426 @default.
- W1981197231 hasIssue "5" @default.
- W1981197231 hasLocation W19811972311 @default.
- W1981197231 hasOpenAccess W1981197231 @default.
- W1981197231 hasPrimaryLocation W19811972311 @default.
- W1981197231 hasRelatedWork W192424684 @default.
- W1981197231 hasRelatedWork W2017707213 @default.
- W1981197231 hasRelatedWork W2050749486 @default.
- W1981197231 hasRelatedWork W2063413054 @default.
- W1981197231 hasRelatedWork W2099374012 @default.
- W1981197231 hasRelatedWork W2159273964 @default.
- W1981197231 hasRelatedWork W2186827571 @default.
- W1981197231 hasRelatedWork W2298728461 @default.
- W1981197231 hasRelatedWork W2392215291 @default.
- W1981197231 hasRelatedWork W3179325637 @default.
- W1981197231 hasVolume "38" @default.
- W1981197231 isParatext "false" @default.
- W1981197231 isRetracted "false" @default.
- W1981197231 magId "1981197231" @default.
- W1981197231 workType "article" @default.